Invention Application
- Patent Title: METHOD FOR MEASURING THIN LAYERS IN SOLID STATE DEVICES
- Patent Title (中): 在固态装置中测量薄层的方法
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Application No.: US11780064Application Date: 2007-07-19
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Publication No.: US20080021673A1Publication Date: 2008-01-24
- Inventor: Alexandre Blander , Richard Brassard , Carl Savard , Julien Sylvestre
- Applicant: Alexandre Blander , Richard Brassard , Carl Savard , Julien Sylvestre
- Priority: CA2552623 20060720
- Main IPC: G01B17/02
- IPC: G01B17/02

Abstract:
A method of using acoustic signals in the form of waves or pulses to non-destructively measure the thickness of a bonding layer sandwiched between and bonding together overlying and underlying materials different from the bonding layer especially when the thickness of the bonding layer is so small that the features (maxima, minima, time position) of the echo from the interface of the bonding layer and the overlying material is indistinguishable, i.e., not independently observable from the features (maxima, minima, time position) of the echo from the interface of the bonding layer and the underlying material.
Public/Granted literature
- US07512518B2 Method for measuring thin layers in solid state devices Public/Granted day:2009-03-31
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