Method for measuring thin layers in solid state devices
    1.
    发明授权
    Method for measuring thin layers in solid state devices 失效
    测量固态器件薄层的方法

    公开(公告)号:US07512518B2

    公开(公告)日:2009-03-31

    申请号:US11780064

    申请日:2007-07-19

    IPC分类号: G06F15/00

    CPC分类号: G01B17/02

    摘要: A method of using acoustic signals in the form of waves or pulses to non-destructively measure the thickness of a bonding layer sandwiched between and bonding together overlying and underlying materials different from the bonding layer especially when the thickness of the bonding layer is so small that the features (maxima, minima, time position) of the echo from the interface of the bonding layer and the overlying material is indistinguishable, i.e., not independently observable from the features (maxima, minima, time position) of the echo from the interface of the bonding layer and the underlying material.

    摘要翻译: 使用波形或脉冲形式的声信号以非破坏性方式测量不同于接合层的覆盖层和下层材料之间的粘合层的厚度,并且粘结在一起,特别是当粘合层的厚度如此小时,特别是当接合层的厚度如此小时, 来自接合层和覆盖材料的界面的回波的特征(最大值,最小值,时间位置)是不可区分的,即不能独立地从来自接口的界面的特征(最大值,最小值,时间位置)观察到回波 粘合层和下层材料。

    METHOD FOR MEASURING THIN LAYERS IN SOLID STATE DEVICES
    3.
    发明申请
    METHOD FOR MEASURING THIN LAYERS IN SOLID STATE DEVICES 失效
    在固态装置中测量薄层的方法

    公开(公告)号:US20080021673A1

    公开(公告)日:2008-01-24

    申请号:US11780064

    申请日:2007-07-19

    IPC分类号: G01B17/02

    CPC分类号: G01B17/02

    摘要: A method of using acoustic signals in the form of waves or pulses to non-destructively measure the thickness of a bonding layer sandwiched between and bonding together overlying and underlying materials different from the bonding layer especially when the thickness of the bonding layer is so small that the features (maxima, minima, time position) of the echo from the interface of the bonding layer and the overlying material is indistinguishable, i.e., not independently observable from the features (maxima, minima, time position) of the echo from the interface of the bonding layer and the underlying material.

    摘要翻译: 使用波形或脉冲形式的声信号以非破坏性方式测量不同于接合层的覆盖层和下层材料之间的粘合层的厚度,并且粘结在一起,特别是当粘合层的厚度如此小时,特别是当接合层的厚度如此小时, 来自接合层和覆盖材料的界面的回波的特征(最大值,最小值,时间位置)是不可区分的,即不能独立地从来自接口的界面的特征(最大值,最小值,时间位置)观察到回波 粘合层和下层材料。