发明申请
- 专利标题： Preparative method for protective layer of susceptor
- 专利标题（中）： 感受器保护层的制备方法
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申请号： US11508235申请日： 2006-08-23
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公开(公告)号： US20080050522A1公开(公告)日： 2008-02-28
- 发明人: Tsun-Neng Yang , Shan-Ming Lan , Ying-Ru Chen , Chin-Chen Chiang , Hung-Sheng Chiu
- 申请人： Tsun-Neng Yang , Shan-Ming Lan , Ying-Ru Chen , Chin-Chen Chiang , Hung-Sheng Chiu
- 申请人地址： TW TAOYUAN
- 专利权人： ATOMIC ENERGY COUNCIL-INSTITUTE OF NUCLEAR ENERGY RESEARCH
- 当前专利权人： ATOMIC ENERGY COUNCIL-INSTITUTE OF NUCLEAR ENERGY RESEARCH
- 当前专利权人地址： TW TAOYUAN
- 主分类号： C23C16/00
- IPC分类号： C23C16/00
摘要：
A protective layer for a susceptor is prepared. The susceptor is a graphite block; and the protective layer consists of a titanium nitride film and a titanium carbide film. The susceptor with the protective layer is used in epitaxial growth and device process with life time prolonged, energy saved, and cost reduced.
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