发明申请
- 专利标题： Apparatus of triple-electrode dielectric barrier discharge at atmospheric pressure
- 专利标题（中）： 大气压下三电极介质阻挡放电装置
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申请号： US11510824申请日： 2006-08-28
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公开(公告)号： US20080060579A1公开(公告)日： 2008-03-13
- 发明人: Cheng-Chang Hsieh , Mien-Win Wu , Chi-Fong Ai
- 申请人： Cheng-Chang Hsieh , Mien-Win Wu , Chi-Fong Ai
- 申请人地址： TW Taoyuan
- 专利权人： ATOMIC ENERGY COUNCIL-INSTITUE OF NUCLEAR ENERGY RESEARCH
- 当前专利权人： ATOMIC ENERGY COUNCIL-INSTITUE OF NUCLEAR ENERGY RESEARCH
- 当前专利权人地址： TW Taoyuan
- 主分类号： C23C16/00
- IPC分类号： C23C16/00
摘要：
A dielectric barrier discharge uses three electrodes at an atmospheric pressure. A wide discharge gap can be used and an enhanced plasma density can be achieved so that thick materials can be processed and its processing speed can also be greatly improved.
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