发明申请
US20080061027A1 Method for forming a micro fuel cell 审中-公开
微型燃料电池的形成方法

Method for forming a micro fuel cell
摘要:
A method is provided for fabricating a fuel cell that requires only front side alignment techniques to fabricate gas access holes. The method comprises etching the front side of a substrate (12) to provide a channel (24, 26), and forming a pedestal (54, 88) on the front side of the substrate, wherein the pedestal (54, 88) comprises an anode side (56, 89) defining a fuel region (68, 102) aligned with the channel (24, 26). An electrolyte (46, 96) is positioned between the anode side (56, 89) and a cathode side (58, 90), and the fuel region (68, 102) is capped with an insulator (66, 98). A portion of the substrate (12) is removed from a back side to expose the channel (24, 26).
信息查询
0/0