发明申请
- 专利标题： MODULAR CVD EPI 300MM REACTOR
- 专利标题（中）： 模块化CVD EPI 300MM反应器
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申请号： US11767619申请日： 2007-06-25
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公开(公告)号： US20080072820A1公开(公告)日： 2008-03-27
- 发明人: Brian Burrows , Craig Metzner , Dennis Demars , Roger Anderson , Juan Chacin , David Carlson , David Ishikawa , Jeffrey Campbell , Richard Collins , Keith Magill , Imran Afzal
- 申请人： Brian Burrows , Craig Metzner , Dennis Demars , Roger Anderson , Juan Chacin , David Carlson , David Ishikawa , Jeffrey Campbell , Richard Collins , Keith Magill , Imran Afzal
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 主分类号： B05C11/00
- IPC分类号： B05C11/00
摘要：
The present invention provides methods and apparatus for processing semiconductor substrates. Particularly, the present invention provides a modular processing cell to be used in a cluster tool. The modular semiconductor processing cell of the present invention comprises a chamber having an inject cap, a gas panel module configured to supply one or more processing gas to the chamber through the inject cap, wherein the gas panel module is position adjacent the inject cap. The processing cell further comprises a lamp module positioned below the chamber. The lamp module comprises a plurality of vertically oriented lamps.
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