发明申请
US20080090099A1 Layer system with at least one mixed crystal layer of a multi-oxide
有权
具有至少一个多氧化物混合晶层的层系统
- 专利标题: Layer system with at least one mixed crystal layer of a multi-oxide
- 专利标题(中): 具有至少一个多氧化物混合晶层的层系统
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申请号: US11548529申请日: 2006-10-11
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公开(公告)号: US20080090099A1公开(公告)日: 2008-04-17
- 发明人: Jurgen Ramm , Beno Widrig , Michael Ante , Christian Wohlrab
- 申请人: Jurgen Ramm , Beno Widrig , Michael Ante , Christian Wohlrab
- 申请人地址: LI Balzers
- 专利权人: OC OERLIKON BALZERS AG
- 当前专利权人: OC OERLIKON BALZERS AG
- 当前专利权人地址: LI Balzers
- 主分类号: B32B9/00
- IPC分类号: B32B9/00 ; B29C35/08 ; C23C16/00
摘要:
A PVD layer system for the coating of workpieces encompasses at least one mixed-crystal layer of a multi-oxide having the following composition: (Me11-xMe2x)2O3, where Me1 and Me2 each represent at least one of the elements Al, Cr, Fe, Li, Mg, Mn, Nb, Ti, Sb or V. The elements of Me1 and Me2 differ from one another. The crystal lattice of the mixed-crystal layer in the PVD layer system has a corundum structure which in an x-ray diffractometrically analyzed spectrum of the mixed-crystal layer is characterized by at least three of the lines associated with the corundum structure. Also disclosed is a vacuum coating method for producing a mixed-crystal layer of a multi-oxide, as well as correspondingly coated tools and components.
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