发明申请
US20080175784A1 METHOD FOR PRODUCING A HIGH PURITY TRISILANE PRODUCT FROM THE PYROLYSIS OF DISILANE 有权
从高分子化学生产高纯度TRISILANE产品的方法

METHOD FOR PRODUCING A HIGH PURITY TRISILANE PRODUCT FROM THE PYROLYSIS OF DISILANE
摘要:
Methods for the production of trisilane from the pyrolysis of disilane in a single reactor.
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