发明申请
US20080175784A1 METHOD FOR PRODUCING A HIGH PURITY TRISILANE PRODUCT FROM THE PYROLYSIS OF DISILANE
有权
从高分子化学生产高纯度TRISILANE产品的方法
- 专利标题: METHOD FOR PRODUCING A HIGH PURITY TRISILANE PRODUCT FROM THE PYROLYSIS OF DISILANE
- 专利标题(中): 从高分子化学生产高纯度TRISILANE产品的方法
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申请号: US11863524申请日: 2007-09-28
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公开(公告)号: US20080175784A1公开(公告)日: 2008-07-24
- 发明人: Cyril Bourasseau , Gregory M. Jursich , Mindi Xu , John P. Borzio , Donald W. Mitchell , Derong Zhou , Thomas K. Moncur
- 申请人: Cyril Bourasseau , Gregory M. Jursich , Mindi Xu , John P. Borzio , Donald W. Mitchell , Derong Zhou , Thomas K. Moncur
- 申请人地址: US CA Fremont US TX Houston FR Paris
- 专利权人: American Air Liquide, Inc.,Air Liquide Electronics U.S. LP,L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
- 当前专利权人: American Air Liquide, Inc.,Air Liquide Electronics U.S. LP,L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
- 当前专利权人地址: US CA Fremont US TX Houston FR Paris
- 主分类号: C01B33/04
- IPC分类号: C01B33/04
摘要:
Methods for the production of trisilane from the pyrolysis of disilane in a single reactor.
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