发明申请
- 专利标题: Vibration detection device
- 专利标题(中): 振动检测装置
-
申请号: US12068397申请日: 2008-02-06
-
公开(公告)号: US20080225274A1公开(公告)日: 2008-09-18
- 发明人: Shoji Hirata , Kayoko Taniguchi , Akihiro Kuroda , Kazutoshi Nomoto
- 申请人: Shoji Hirata , Kayoko Taniguchi , Akihiro Kuroda , Kazutoshi Nomoto
- 申请人地址: JP Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2007-036411 20070216
- 主分类号: G01N21/00
- IPC分类号: G01N21/00
摘要:
A vibration detection device includes: a light source emitting a laser beam; an interferometer including a vibrating body and a reflecting body both capable of reflecting the laser beam, a polarizing beam splitter splitting a laser beam emitted from the light source into beams traveling along first and second optical paths, a first ¼ wave plate arranged between the polarizing beam splitter and the vibrating body in the first optical path, and a second ¼ wave plate arranged between the polarizing beam splitter and the reflecting body in the second optical path, the interferometer causing interference between a reflected beam reflected by the vibrating body and a reference beam reflected by the reflecting body to form a interference pattern; and a detection means quantizing the vibration of the vibrating body on the basis of the formed interference pattern to detect the vibration.