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公开(公告)号：US20080225274A1
公开(公告)日：2008-09-18
申请号：US12068397
申请日：2008-02-06
IPC分类号： G01N21/00
CPC分类号： G01H9/00 , H04R1/005 , H04R23/008
摘要： A vibration detection device includes: a light source emitting a laser beam; an interferometer including a vibrating body and a reflecting body both capable of reflecting the laser beam, a polarizing beam splitter splitting a laser beam emitted from the light source into beams traveling along first and second optical paths, a first ¼ wave plate arranged between the polarizing beam splitter and the vibrating body in the first optical path, and a second ¼ wave plate arranged between the polarizing beam splitter and the reflecting body in the second optical path, the interferometer causing interference between a reflected beam reflected by the vibrating body and a reference beam reflected by the reflecting body to form a interference pattern; and a detection means quantizing the vibration of the vibrating body on the basis of the formed interference pattern to detect the vibration.
摘要翻译： 振动检测装置包括：发射激光束的光源; 包括能够反射激光束的振动体和反射体的干涉仪，将从光源发射的激光束分离成沿着第一和第二光路行进的光束的偏振分束分离器，配置在偏振光 分束器和第一光路中的振动体，以及布置在第二光路中的偏振分束器和反射体之间的第二1/4波片，干涉仪引起由振动体反射的反射光束与参考 由反射体反射的光束形成干涉图案; 以及检测装置，根据形成的干涉图案量化振动体的振动，以检测振动。
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2.发明授权公开(公告)号：US07336367B2
公开(公告)日：2008-02-26
申请号：US11654815
申请日：2007-01-18
IPC分类号： G01B9/02
CPC分类号： G01D5/38
摘要： A displacement detection device having excellent stability with the lapse of time and suitable for reduction in size and weight includes: a light source for emitting light; polarizing light splitting unit for splitting the light emitted from the light source into two light beams having difference polarized components, radiating the two light beams to an external optical system, and combining the two light beams reflected by the external optical system to generate combined light; a phase plate provided between the light source and the polarizing light splitting unit and adapted for changing the polarization state of the light emitted from the light source and leading the light to the polarizing light splitting unit; light splitting films for splitting the combined light generated by the polarizing light splitting unit into plural light beams; polarizing units for transmitting only a predetermined polarized components of the split combined light beams; and light-receiving elements for photoelectrically converting coherent light beams transmitted through the polarizing units and thus generating an interference signal.
摘要翻译： 具有优异的时间稳定性和适合于减小尺寸和重量的位移检测装置包括：用于发光的光源; 偏振光分离单元，用于将从光源发射的光分成具有差分偏振分量的两个光束，将两个光束照射到外部光学系统，并且组合由外部光学系统反射的两个光束以产生组合光; 设置在所述光源和所述偏振光分离单元之间的相位板，用于改变从所述光源发射的光的偏振状态并将光引导到所述偏振光分离单元; 用于将由偏振光分离单元产生的组合光分离成多个光束的分光膜; 用于仅透射分离的组合光束的预定偏振分量的偏振单元; 以及用于光电转换透射通过偏振单元的相干光束并由此产生干涉信号的光接收元件。
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3.发明授权Light-emitting/receiving combined unit and displacement sensors using the same 有权发光/接收组合单元和使用其的位移传感器公开(公告)号：US06980303B2
公开(公告)日：2005-12-27
申请号：US10240417
申请日：2002-02-01
CPC分类号： G01D5/38
摘要： The present invention provides a light emitting/receiving composite unit (1) for emitting and receiving lights, which includes a light source (3), an optical splitting unit (4) for splitting returning lights to the composite unit (1) into a plurality of lights, a polarizing unit (5) for increasing and decreasing quantity of lights transmitted therefrom corresponding to polarization state of the returning lights, and an optical receiving unit (6) which has a plurality of photo-detecting elements (6—1 to 6—4) for detecting the lights transmitted through the polarizing unit (5), which are unitedly integrated into one unit. Also, the present invention provides a displacement detection apparatus of grating interference type, which includes thus unitedly integrated composite unit (1), and an external optical system of an objective unit having a reflection type diffraction grating RG, a reflecting unit (R1a, R1b) for reflecting lights from the composite unit (1) to the reflection type diffraction grating RG, a polarizing unit (WP1a, WP1b) for changing polarization state of diffracted lights from the reflection type diffraction grating RG, and a reflecting unit (R2a, R2b) for reflecting lights transmitted through the polarizing unit (WP1a, WP1b) to cause the reflected lights go backward.
摘要翻译： 本发明提供了一种用于发光和接收光的发光/接收复合单元（1），其包括光源（3），用于将复归单元（1）的返回光分离成多个的光分离单元（4） 的光接收单元（6），其具有用于增加和减少与其相对应的返回光的偏振状态的光传输的光量;以及光接收单元（6），其具有多个光检测元件（6〜 用于检测透射通过偏振单元（5）的光，其被统一地集成到一个单元中。 此外，本发明提供一种光栅干涉型位移检测装置，其包括如此一体化的复合单元（1）和具有反射型衍射光栅RG的目标单元的外部光学系统，反射单元（R 1a ，用于将来自复合单元（1）的光反射到反射型衍射光栅RG的偏振单元（WP1a，WP1b），用于改变来自反射型衍射光栅RG的衍射光的偏振状态， 以及用于反射透射通过偏振单元（WP1a，WP1b）的光的反射单元（R 2 a，R 2 b），以使反射光向后移动。
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公开(公告)号：US20090033946A1
公开(公告)日：2009-02-05
申请号：US12177977
申请日：2008-07-23
申请人： Masahito Kon , Kayoko Taniguchi , Hideaki Tamiya , Yasuhiko Onodera , Hideki Tsuchiya , Akihiro Kuroda
发明人： Masahito Kon , Kayoko Taniguchi , Hideaki Tamiya , Yasuhiko Onodera , Hideki Tsuchiya , Akihiro Kuroda
摘要： Disclosed is a displacement measuring apparatus that includes a composite scale having a magnetic pattern and a diffraction grating each aligned in a direction of measuring axis, and a detector head moving in a direction of measuring axis relative to the composite scale. The detector head has a magnetic detection unit detecting a magnetic field exerted by the magnetic pattern to generate first reproduced signals, a light source irradiating the diffraction grating with light, and an optical detection unit detecting the light diffracted by the diffraction grating to generate second reproduced signals. In composite scale, the magnetic pattern and the diffraction grating are arranged such that a pitch of the first reproduced signals is larger than that of the second reproduced signals.
摘要翻译： 公开了一种位移测量装置，其包括具有磁性图案和衍射光栅的复合刻度尺，所述复合刻度尺沿测量轴线的方向排列，以及检测器头沿相对于复合刻度的测量轴线的方向移动。 检测器头具有磁检测单元，其检测由磁图案施加的磁场以产生第一再现信号，用光照射衍射光栅的光源;以及光学检测单元，其检测由衍射光栅衍射的光以产生第二再现 信号。 在复合尺度中，磁图案和衍射光栅被布置成使得第一再现信号的间距大于第二再现信号的间距。
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5.发明申请公开(公告)号：US20070115479A1
公开(公告)日：2007-05-24
申请号：US11654815
申请日：2007-01-18
IPC分类号： G01B9/02
CPC分类号： G01D5/38
摘要： A displacement detection device having excellent stability with the lapse of time and suitable for reduction in size and weight includes: a light source for emitting light; polarizing light splitting unit for splitting the light emitted from the light source into two light beams having difference polarized components, radiating the two light beams to an external optical system, and combining the two light beams reflected by the external optical system to generate combined light; a phase plate provided between the light source and the polarizing light splitting unit and adapted for changing the polarization state of the light emitted from the light source and leading the light to the polarizing light splitting unit; light splitting films for splitting the combined light generated by the polarizing light splitting unit into plural light beams; polarizing units for transmitting only a predetermined polarized components of the split combined light beams; and light-receiving elements for photoelectrically converting coherent light beams transmitted through the polarizing units and thus generating an interference signal.
摘要翻译： 具有优异的时间稳定性和适合于减小尺寸和重量的位移检测装置包括：用于发光的光源; 偏振光分离单元，用于将从光源发射的光分成具有差分偏振分量的两个光束，将两个光束照射到外部光学系统，并且组合由外部光学系统反射的两个光束以产生组合光; 设置在所述光源和所述偏振光分离单元之间的相位板，用于改变从所述光源发射的光的偏振状态并将光引导到所述偏振光分离单元; 用于将由偏振光分离单元产生的组合光分离成多个光束的分光膜; 用于仅透射分离的组合光束的预定偏振分量的偏振单元; 以及用于光电转换透射通过偏振单元的相干光束并由此产生干涉信号的光接收元件。
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公开(公告)号：US20050036229A1
公开(公告)日：2005-02-17
申请号：US10885064
申请日：2004-07-07
申请人： Kayoko Taniguchi , Akihiro Kuroda
发明人： Kayoko Taniguchi , Akihiro Kuroda
CPC分类号： G11B5/59633
摘要： An information writing device in which the information can be written accurately efficiently and in which variable formats of the disc-shaped recording mediums can be coped with without the necessity of providing master discs from one format of the disc-shaped recording medium to another. A grating interferometer clock scale system is formed by a clock pattern disc 50 having a clock track 52 carrying an optically readable clock pattern 51 and an optical head 60 for optically reading out the clock pattern 51. Clock signals are generated in a clock generator 90, to which is transmitted, via an optical fiber 80, the interference light obtained as an optical output obtained in turn by optically reading out the clock pattern 51 by the optical head 60, based on electrical signals obtained on photoelectrically transducing the optical output. The servo information synchronized with the clock signals is generated by a servo information generating part 93.
摘要翻译： 一种信息写入装置，其中可以准确有效地写入信息，并且可以处理盘形记录介质的可变格式，而不需要从盘形记录介质的一种格式提供主盘。 光栅干涉仪时钟刻度系统由具有携带光学可读时钟图形51的时钟轨道52的时钟图形盘50和用于光学读出时钟图形51的光学头60形成。在时钟发生器90中产生时钟信号， 基于通过光电转换光输出获得的电信号，通过光纤80将通过光头60光学读出时钟图形51而获得的作为光输出获得的干涉光透过。 与时钟信号同步的伺服信息由伺服信息生成部93生成。
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公开(公告)号：US07808650B2
公开(公告)日：2010-10-05
申请号：US12177977
申请日：2008-07-23
申请人： Masahito Kon , Kayoko Taniguchi , Hideaki Tamiya , Yasuhiko Onodera , Hideki Tsuchiya , Akihiro Kuroda
发明人： Masahito Kon , Kayoko Taniguchi , Hideaki Tamiya , Yasuhiko Onodera , Hideki Tsuchiya , Akihiro Kuroda
IPC分类号： G01B11/02
摘要： Disclosed is a displacement measuring apparatus that includes a composite scale having a magnetic pattern and a diffraction grating each aligned in a direction of measuring axis, and a detector head moving in a direction of measuring axis relative to the composite scale. The detector head has a magnetic detection unit detecting a magnetic field exerted by the magnetic pattern to generate first reproduced signals, a light source irradiating the diffraction grating with light, and an optical detection unit detecting the light diffracted by the diffraction grating to generate second reproduced signals. In composite scale, the magnetic pattern and the diffraction grating are arranged such that a pitch of the first reproduced signals is larger than that of the second reproduced signals.
摘要翻译： 公开了一种位移测量装置，其包括具有磁性图案和衍射光栅的复合刻度尺，所述复合刻度尺沿测量轴线的方向排列，以及检测器头沿相对于复合刻度的测量轴线的方向移动。 检测器头具有检测由磁图案施加的磁场以产生第一再现信号的磁检测单元，用光照射衍射光栅的光源以及检测由衍射光栅衍射的光以产生第二再现的光学检测单元 信号。 在复合尺度中，磁图案和衍射光栅被布置成使得第一再现信号的间距大于第二再现信号的间距。
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公开(公告)号：US07187449B2
公开(公告)日：2007-03-06
申请号：US10414860
申请日：2003-04-15
IPC分类号： G01B9/02
CPC分类号： G01D5/38
摘要： A displacement detection device having excellent stability with the lapse of time and suitable for reduction in size and weight includes: a light source for emitting light; polarizing light splitting unit for splitting the light emitted from the light source into two light beams having difference polarized components, radiating the two light beams to an external optical system, and combining the two light beams reflected by the external optical system to generate combined light; a phase plate provided between the light source and the polarizing light splitting unit and adapted for changing the polarization state of the light emitted from the light source and leading the light to the polarizing light splitting unit; light splitting films for splitting the combined light generated by the polarizing light splitting unit into plural light beams; polarizing units for transmitting only a predetermined polarized components of the split combined light beams; and light-receiving elements for photoelectrically converting coherent light beams transmitted through the polarizing units and thus generating an interference signal.
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公开(公告)号：US07136241B2
公开(公告)日：2006-11-14
申请号：US10885064
申请日：2004-07-07
申请人： Kayoko Taniguchi , Akihiro Kuroda
发明人： Kayoko Taniguchi , Akihiro Kuroda
IPC分类号： G11B5/09
CPC分类号： G11B5/59633
摘要： An information writing device in which the information can be written accurately efficiently and in which variable formats of the disc-shaped recording mediums can be coped with without the necessity of providing master discs from one format of the disc-shaped recording medium to another. A grating interferometer clock scale system is formed by a clock pattern disc 50 having a clock track 52 carrying an optically readable clock pattern 51 and an optical head 60 for optically reading out the clock pattern 51. Clock signals are generated in a clock generator 90, to which is transmitted, via an optical fiber 80, the interference light obtained as an optical output obtained in turn by optically reading out the clock pattern 51 by the optical head 60, based on electrical signals obtained on photoelectrically transducing the optical output. The servo information synchronized with the clock signals is generated by a servo information generating part 93.
摘要翻译： 一种信息写入装置，其中可以准确有效地写入信息，并且可以处理盘形记录介质的可变格式，而不需要从盘形记录介质的一种格式提供主盘。 光栅干涉仪时钟刻度系统由具有携带光学可读时钟图形51的时钟轨道52的时钟图形盘50和用于光学读出时钟图形51的光学头60形成。 在时钟发生器90中产生时钟信号，时钟发生器90通过光纤80发送通过光头60基于电信号光学地读出时钟图形51而获得的光输出获得的干涉光 通过光电转换光输出获得。 与时钟信号同步的伺服信息由伺服信息生成部93生成。
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公开(公告)号：US07034948B2
公开(公告)日：2006-04-25
申请号：US10692376
申请日：2003-10-22
申请人： Hideaki Tamiya , Kayoko Taniguchi , Akihiro Kuroda
发明人： Hideaki Tamiya , Kayoko Taniguchi , Akihiro Kuroda
IPC分类号： G01B9/02
CPC分类号： G01D5/34707
摘要： A displacement pickup is provided which includes a displaceable scale (12) having defined therein a first area (12a) where positional information is recorded with a predetermined pitch and a second area (12b) where positional information is recorded with a predetermined pitch different from that in the first area (12a), a first reading system (10) to read the positional information recorded in the first area (12a), a first phase detector (14) to detect a first phase on the basis of the positional information read by the first reading system (10), a second reading system (11) to read the positional information recorded in the second area (12b), a second phase detector (15) to detect a second phase on the basis of the positional information read by the second reading system (11), a phase comparator (16) to make a comparison between the first and second phases, and an origin signal generator (17) to generate an origin signal according to the result of comparison from the phase comparator (16).
摘要翻译： 提供一种位移拾取器，其包括可移位标尺（12），其中限定了第一区域（12a），其中以预定间距记录位置信息;以及第二区域（12b），其中以预定间距记录位置信息 从第一区域（12a）中的第一相位检测器（12a）读取记录在第一区域（12a）中的位置信息的第一读取系统（10），基于第一区域 由第一读取系统（10）读取的位置信息，读取记录在第二区域（12b）中的位置信息的第二读取系统（11），第二相位检测器（15），用于基于 由第二读取系统（11）读取的位置信息，用于进行第一和第二相位之间的比较的相位比较器（16）和根据比较结果产生原点信号的原点信号发生器（17） n相位比较器（16）。
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