- 专利标题： Method of producing a MEMS device
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申请号： US12129283申请日： 2008-05-29
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公开(公告)号： US20080225505A1公开(公告)日： 2008-09-18
- 发明人: John R. Martin , Manolo G. Mena , Elmer S. Lacsamana , Michael P. Duffy , William A. Webster , Lawrence E. Felton , Maurice S. Karpman
- 申请人： John R. Martin , Manolo G. Mena , Elmer S. Lacsamana , Michael P. Duffy , William A. Webster , Lawrence E. Felton , Maurice S. Karpman
- 申请人地址： US MA Norwood
- 专利权人： ANALOG DEVICES, INC.
- 当前专利权人： ANALOG DEVICES, INC.
- 当前专利权人地址： US MA Norwood
- 主分类号： H01L21/50
- IPC分类号： H01L21/50 ; H05K7/00
摘要：
A method of producing a MEMS device removes the bottom side of a device wafer after its movable structure is formed. To that end, the method provides the device wafer, which has an initial bottom side. Next, the method forms the movable structure on the device wafer, and then removes substantially the entire initial bottom side of the device wafer. Removal of the entire initial bottom side effectively forms a final bottom side.
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