发明申请
- 专利标题： METHODS AND APPARATUS FOR GENERATING A LIBRARY OF SPECTRA
- 专利标题（中）： 用于生成谱图的方法和装置
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申请号： US12059435申请日： 2008-03-31
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公开(公告)号： US20080243433A1公开(公告)日： 2008-10-02
- 发明人: Abraham Ravid , Boguslaw A. Swedek , Dominic J. Benvegnu , Jeffrey Drue David , Jun Qian , Sidney P. Huey , Ingemar Carlsson , Lakshmanan Karuppiah , Harry Q. Lee
- 申请人： Abraham Ravid , Boguslaw A. Swedek , Dominic J. Benvegnu , Jeffrey Drue David , Jun Qian , Sidney P. Huey , Ingemar Carlsson , Lakshmanan Karuppiah , Harry Q. Lee
- 主分类号： G01B5/06
- IPC分类号： G01B5/06
摘要：
A method of generating a library from a reference substrate for use in processing product wafers is described. The method includes measuring substrate characteristics at a plurality of well-defined points of a reference substrate, measuring spectra at plurality of measurement points of the reference substrate, there being more measurement points than well-defined points, and associating measured spectra with measured substrate characteristics.
公开/授权文献
- US07840375B2 Methods and apparatus for generating a library of spectra 公开/授权日：2010-11-23
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