发明申请
- 专利标题: TWO DEGREE OF FREEDOM MOVERS WITH OVERLAPPING COILS
- 专利标题(中): 具有超重线圈的自由度的两个自由度
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申请号: US12061428申请日: 2008-04-02
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公开(公告)号: US20080252151A1公开(公告)日: 2008-10-16
- 发明人: Michael B. Binnard , Masahiro Totsu
- 申请人: Michael B. Binnard , Masahiro Totsu
- 申请人地址: JP Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JP Tokyo
- 主分类号: H02K41/00
- IPC分类号: H02K41/00
摘要:
A mover (344) that moves a stage (238) along a first axis and along a second axis includes a magnetic component (354), a conductor component (356), and a control system (324). The magnetic component (354) includes one or more magnets (354D) that are surrounded by a magnetic field. The conductor component (356) is positioned near the magnetic component (354). Further, the conductor component (356) interacts with the magnetic component (354) when current is directed to the conductor component (356). The control system (224) directs current to the conductor component (356) to generate a controllable force along the first axis and a controllable force along the second axis. With this design, the same mover (344) can be used to move the stage (238) along two degrees of freedom (“DOF”). Further, the conductor component (356) including a first phase coil (364A) and a second phase coil (364B) that partly overlaps the first phase coil (364A). With this design, the size and efficiency of the mover (334) is significantly improved. As a result thereof, the overall footprint of the mover (344) can be reduced and the heat generated by the mover (344) is minimized.
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