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    TWO DEGREE OF FREEDOM MOVERS WITH OVERLAPPING COILS
    1.
    发明申请
    TWO DEGREE OF FREEDOM MOVERS WITH OVERLAPPING COILS 审中-公开
    具有超重线圈的自由度的两个自由度

    公开(公告)号：US20080252151A1

    公开(公告)日：2008-10-16

    申请号：US12061428

    申请日：2008-04-02

    申请人： Michael B. Binnard ,  Masahiro Totsu

    发明人： Michael B. Binnard ,  Masahiro Totsu

    IPC分类号： H02K41/00

    CPC分类号： H02K41/03 ,  G03F7/70758 ,  H02K2201/18

    摘要： A mover (344) that moves a stage (238) along a first axis and along a second axis includes a magnetic component (354), a conductor component (356), and a control system (324). The magnetic component (354) includes one or more magnets (354D) that are surrounded by a magnetic field. The conductor component (356) is positioned near the magnetic component (354). Further, the conductor component (356) interacts with the magnetic component (354) when current is directed to the conductor component (356). The control system (224) directs current to the conductor component (356) to generate a controllable force along the first axis and a controllable force along the second axis. With this design, the same mover (344) can be used to move the stage (238) along two degrees of freedom (“DOF”). Further, the conductor component (356) including a first phase coil (364A) and a second phase coil (364B) that partly overlaps the first phase coil (364A). With this design, the size and efficiency of the mover (334) is significantly improved. As a result thereof, the overall footprint of the mover (344) can be reduced and the heat generated by the mover (344) is minimized.

    摘要翻译： 沿着第一轴线和第二轴线移动台架（238）的移动器（344）包括磁性部件（354），导体部件（356）和控制系统（324）。 磁性部件（354）包括由磁场包围的一个或多个磁体（354D）。 导体部件（356）位于磁性部件（354）附近。 此外，当电流被引导到导体部件（356）时，导体部件（356）与磁性部件（354）相互作用。 控制系统（224）将电流引导到导体部件（356）以沿着第一轴线产生可控制的力并且沿着第二轴线产生可控制的力。 通过这种设计，可以使用相同的移动器（344）沿两个自由度（“DOF”）移动平台（238）。 此外，导体部件（356）包括与第一相线圈（364A）部分重叠的第一相线圈（364A）和第二相线圈（364B）。 通过这种设计，移动器（334）的尺寸和效率得到显着提高。 作为其结果，可以减小动子（344）的总体占地面积，并且由动子（344）产生的热量最小化。

    THREE DEGREE OF MOVEMENT MOVER AND METHOD FOR CONTROLLING A THREE DEGREE OF MOVEMENT MOVER
    3.
    发明申请
    THREE DEGREE OF MOVEMENT MOVER AND METHOD FOR CONTROLLING A THREE DEGREE OF MOVEMENT MOVER 审中-公开
    运动运动的三个程度和控制三个运动程度的方法

    公开(公告)号：US20100167556A1

    公开(公告)日：2010-07-01

    申请号：US12596569

    申请日：2008-04-16

    申请人： Masahiro Totsu ,  Michael B. Binnard ,  Scott Coakley

    发明人： Masahiro Totsu ,  Michael B. Binnard ,  Scott Coakley

    IPC分类号： H01L21/26 ,  G03B27/58 ,  H02K41/02 ,  H02P7/285 ,  H05K13/00

    CPC分类号： H02K41/03 ,  G03F7/70758 ,  H02K2201/18 ,  H02P25/06 ,  Y10T29/49002

    摘要： A mover (344) moving a stage (238) along a first axis and about a second axis includes a magnetic component (454), and a conductor component (456). The magnetic component (454) includes one or more magnets (454D) that are surrounded by a magnetic field. The conductor component (456) is positioned near the magnetic component (454) in the magnetic field. Further, the conductor component (456) interacts with the magnetic component (454) when current is directed to the conductor component (456) to generate a controlled force along the first axis, and a controlled moment about the second axis. Additionally, the conductor component (456) interacts with the magnetic component (454) to generate a controlled force along a third axis that is perpendicular to the first axis and the second axis when current is directed to the conductor component (456).

    摘要翻译： 沿着第一轴线和第二轴线移动台架（238）的移动器（344）包括磁性部件（454）和导体部件（456）。 磁性部件（454）包括由磁场包围的一个或多个磁体（454D）。 导体部件（456）位于磁场附近的磁性部件（454）附近。 此外，当电流指向导体部件（456）时，导体部件（456）与磁性部件（454）相互作用，以产生沿着第一轴线的受控力，以及围绕第二轴线的受控力矩。 另外，当电流被引导到导体部件（456）时，导体部件（456）与磁性部件（454）相互作用，以沿垂直于第一轴线和第二轴线的第三轴线产生受控的力。

    Method for determining a commutation offset and for determining a compensation map for a stage
    4.
    发明授权
    Method for determining a commutation offset and for determining a compensation map for a stage 有权
    用于确定换向偏移和用于确定载物台的补偿图的方法

    公开(公告)号：US09465305B2

    公开(公告)日：2016-10-11

    申请号：US13101264

    申请日：2011-05-05

    申请人： Pai-Hsueh Yang ,  Scott Coakley ,  Michael B. Binnard ,  Kazuhiro Hirano ,  Bausan Yuan ,  Shiang-Lung Koo

    发明人： Pai-Hsueh Yang ,  Scott Coakley ,  Michael B. Binnard ,  Kazuhiro Hirano ,  Bausan Yuan ,  Shiang-Lung Koo

    IPC分类号： H02K41/00 ,  G03F7/20 ,  H02P6/00

    CPC分类号： G03F7/70758 ,  G03F7/70516 ,  G03F7/70775 ,  H02P6/006

    摘要： A method for determining a commutation offset for a mover (250A) of a mover assembly (220C) that moves and positions a stage (220A) relative to a stage base (220B) includes controlling the mover assembly (220C) in a closed loop fashion to maintain the position of the stage (220A) along a first axis and along a second axis with the stage (220A) levitated above the stage base (220B). The method also includes the steps of (i) directing current to a coil array (240) of the mover assembly (220C) so that the mover assembly (220C) imparts a disturbance on the stage (220A); and (ii) evaluating one or more forces generated by the mover assembly (220C) as a result of the disturbance on the stage (220A) created by the mover (250A). Further, a method for generating a compensation map (1402) includes sequentially directing a plurality of excitation signals to the control of the mover assembly (220C) and determining the control commands that result from the plurality of excitation signals.

    摘要翻译： 用于确定相对于台架（220B）移动和定位平台（220A）的移动器组件（220C）的移动器（250A）的换向偏移的方法包括以闭环方式控制所述动子组件（220C） 以使台架（220A）沿着第一轴线并且沿着第二轴线保持台架（220A）的位置，台架（220A）悬浮在平台底座（220B）上方。 该方法还包括以下步骤：（i）将电流引导到移动器组件（220C）的线圈阵列（240），使得移动器组件（220C）在平台（220A）上施加干扰; 以及（ii）评估由所述移动器组件（220C）产生的由所述移动器（250A）产生的所述平台（220A）上的干扰所产生的一个或多个力。 此外，用于产生补偿图（1402）的方法包括将多个激励信号顺序地引导到移动器组件（220C）的控制，并且确定由多个激励信号产生的控制命令。

    High Efficiency Voice Coil Motor
    6.
    发明申请
    High Efficiency Voice Coil Motor 审中-公开

    公开(公告)号：US20080165451A1

    公开(公告)日：2008-07-10

    申请号：US12050675

    申请日：2008-03-18

    申请人： Michael B. Binnard ,  Jean-Marc Gery ,  Andrew J. Hazelton

    发明人： Michael B. Binnard ,  Jean-Marc Gery ,  Andrew J. Hazelton

    IPC分类号： G11B5/55

    CPC分类号： H02K41/0356 ,  H02K2201/18

    摘要： Methods and apparatus for increasing the efficiency of a voice coil motor (VCM) are disclosed. According to one aspect of the present invention, a cylindrical and radially symmetric VCM includes a plurality of sets of magnets, and a single coil. The plurality of sets of the magnets are each arranged in an array configuration, and cooperate to form a magnetic field. The coil receives current and has a plurality of windings. A first space is defined within the coil, and the plurality of sets of the magnets are arranged such that a first set of the magnets is positioned within the first space and a second set of the magnets is positioned external to the coil.

    High efficiency voice coil motor
    7.
    发明授权
    High efficiency voice coil motor 失效
    高效音圈电机

    公开(公告)号：US07368838B2

    公开(公告)日：2008-05-06

    申请号：US10908178

    申请日：2005-04-29

    申请人： Michael B. Binnard ,  Jean-Marc Gery ,  Andrew J. Hazelton

    发明人： Michael B. Binnard ,  Jean-Marc Gery ,  Andrew J. Hazelton

    IPC分类号： H02K33/00

    CPC分类号： H02K41/0356 ,  H02K2201/18

    摘要： Methods and apparatus for increasing the efficiency of a voice coil motor (VCM) are disclosed. According to one aspect of the present invention, a cylindrical and radially symmetric VCM includes a plurality of sets of magnets, and a single coil. The plurality of sets of the magnets are each arranged in an array configuration, and cooperate to form a magnetic field. The coil receives current and has a plurality of windings. A first space is defined within the coil, and the plurality of sets of the magnets are arranged such that a first set of the magnets is positioned within the first space and a second set of the magnets is positioned external to the coil.

    摘要翻译： 公开了提高音圈电机（VCM）效率的方法和装置。 根据本发明的一个方面，圆柱形和径向对称的VCM包括多组磁体和单个线圈。 多组磁体各配置成阵列构造，并配合形成磁场。 线圈接收电流并具有多个绕组。 第一空间被限定在线圈内，并且多组磁体被布置成使得第一组磁体位于第一空间内，而第二组磁体位于线圈的外部。

    Methods for limiting counter-mass trim-motor force and stage assemblies incorporating same
    8.
    发明授权
    Methods for limiting counter-mass trim-motor force and stage assemblies incorporating same 有权
    限制反质量调节马达力的方法和包含相同质量的马达的阶段组件

    公开(公告)号：US09529353B2

    公开(公告)日：2016-12-27

    申请号：US13228341

    申请日：2011-09-08

    申请人： Pai-Hsueh Yang ,  Michael B. Binnard ,  Scott Coakley

    发明人： Pai-Hsueh Yang ,  Michael B. Binnard ,  Scott Coakley

    IPC分类号： G03B27/58 ,  G03B27/62 ,  G05B19/404 ,  G03F7/20

    CPC分类号： G05B19/404 ,  G03F7/70725 ,  G03F7/70766

    摘要： An exemplary stage assembly has movable stage mass and counter-mass. A stage motor is coupled to the stage mass and counter-mass such that stage-mass motion imparted by the stage motor causes a reactive motion of the counter-mass counter to the motion of the stage mass. At least one trim-motor is coupled to the counter-mass. A control system commands the trim-motor to regulate movement of the counter-mass in reaction to stage-mass motion. A PI feedback controller receives the following-error of the counter-mass and generates corresponding center-of-gravity (CG) force commands and trim-motor force commands to the trim-motor(s) to produce corrective counter-mass motion. A trim-motor force limiter receives trim-motor force commands and produces corresponding limited trim-motor force commands that are fed back as actual CG force commands to the feedback controller to modify integral terms of the feedback controller according to the limited trim-motor force commands.

    摘要翻译： 示例性的舞台组件具有可移动的舞台质量和反质量。 舞台电机被耦合到舞台质量和反质量，使得由舞台电动机施加的舞台质量运动导致反质量计数器对舞台质量的运动的反作用运动。 至少一个调整电机与反质量联接。 控制系统命令微调电机调节反质量运动反应阶段质量运动。 PI反馈控制器接收反质量的跟随误差，并产生相应的重心（CG）力指令和微调电机力指令给微调电机，以产生校正反质量运动。 修剪马达力限制器接收修剪马达力指令并产生相应的有限的修剪马达力命令，作为实际的CG力命令反馈到反馈控制器，以根据限制的修正马达力修改反馈控制器的积分项 命令。

    Control systems and methods for compensating for effects of a stage motor
    9.
    发明授权
    Control systems and methods for compensating for effects of a stage motor 有权
    用于补偿平台电机的影响的控制系统和方法

    公开(公告)号：US08853988B2

    公开(公告)日：2014-10-07

    申请号：US12406322

    申请日：2009-03-18

    申请人： Michael B. Binnard ,  Scott Coakley ,  Douglas C. Watson ,  Pai-Hsueh Yang

    发明人： Michael B. Binnard ,  Scott Coakley ,  Douglas C. Watson ,  Pai-Hsueh Yang

    IPC分类号： G05B1/06 ,  G05B19/404 ,  G03F7/20

    CPC分类号： G05B19/404 ,  G03F7/70725 ,  G03F7/70758 ,  G05B2219/41128 ,  G05B2219/41443

    摘要： Embodiments of the invention compensate for one or more effects of a stage motor in a precision stage device. A feedforward module receives an input signal corresponding to the effect of the motor and generates a feedforward control signal that can be used to modify a motor control signal to compensate for the effect of the motor. In some embodiments, a control system is provided to compensate for a back-electromotive force generated by a motor, while in other embodiments, a control system may compensate for an inductive effect of a motor. Embodiments of the invention may be useful in precision stage devices, for example, lithography devices such as steppers and scanners.

    摘要翻译： 本发明的实施例补偿了精密级装置中的级电动机的一个或多个效果。 前馈模块接收与电动机的效果相对应的输入信号，并产生可用于修改电动机控制信号以补偿电动机的影响的前馈控制信号。 在一些实施例中，提供控制系统以补偿由电动机产生的反电动势，而在其他实施例中，控制系统可以补偿电动机的感应效应。 本发明的实施例可用于精密平台装置，例如平版印刷装置，例如步进器和扫描器。