发明申请
- 专利标题: MOVING INTERLEAVED SPUTTER CHAMBER SHIELDS
- 专利标题(中): 移动交互式飞溅室
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申请号: US12169238申请日: 2008-07-08
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公开(公告)号: US20080264340A1公开(公告)日: 2008-10-30
- 发明人: Robert Martinson , Norman Bourdon , Kwok Fai Lai , Dhairya Shrivastava , Paul Shufflebothan
- 申请人: Robert Martinson , Norman Bourdon , Kwok Fai Lai , Dhairya Shrivastava , Paul Shufflebothan
- 申请人地址: US CA San Jose
- 专利权人: Novellus Systems, Inc.
- 当前专利权人: Novellus Systems, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: C23C16/00
- IPC分类号: C23C16/00
摘要:
A shielding system for a physical vapor deposition chamber having a sputter target above the pedestal. The shielding system comprises a pedestal shield attachable to the pedestal and movable therewith. The pedestal shield surrounds and extends outward from the pedestal toward the chamber side or lower walls. The system also comprises a sidewall shield adapted to extend substantially around and within the chamber sidewalls, and downward from an upper portion thereof. The sidewall shield has a lower end extending inward and disposed adjacent the pedestal shield upper portion when the pedestal is in the raised position. The pedestal shield and sidewall shield cooperate, when the pedestal is in the raised position, to prevent line-of-sight deposition transmission from the sputter target to the side and lower walls of the deposition chamber.
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