发明申请
US20080266548A1 Method for characterizing transparent thin-films using differential optical sectioning interference microscopy 失效
使用差分光学切片干涉显微镜表征透明薄膜的方法

  • 专利标题: Method for characterizing transparent thin-films using differential optical sectioning interference microscopy
  • 专利标题(中): 使用差分光学切片干涉显微镜表征透明薄膜的方法
  • 申请号: US11789769
    申请日: 2007-04-25
  • 公开(公告)号: US20080266548A1
    公开(公告)日: 2008-10-30
  • 发明人: Chau-Hwang LeeChun-Chieh Wang
  • 申请人: Chau-Hwang LeeChun-Chieh Wang
  • 申请人地址: TW Nan-Kang
  • 专利权人: Academia Sinica
  • 当前专利权人: Academia Sinica
  • 当前专利权人地址: TW Nan-Kang
  • 主分类号: G01N21/00
  • IPC分类号: G01N21/00 G06F15/00
Method for characterizing transparent thin-films using differential optical sectioning interference microscopy
摘要:
An imaging, differential optical sectioning interference microscopy (DOSIM) system and method for measuring refractive indices and thicknesses of transparent thin-films. The refractive index and thickness are calculated from two interferometric images of the sample transparent thin-film having a vertical offset that falls within the linear region of an axial response curve of optically sectioning microscopy. Here, the images are formed by a microscope objective in the normal direction, i.e., in the direction perpendicular to the latitudinal surface of the thin-film. As a result, the lateral resolution of the transparent thin-film is estimated based on the Rayleigh criterion, 0.61λ/NA.
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