发明申请
- 专利标题: Phase Change Memory
- 专利标题(中): 相变记忆
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申请号: US11749017申请日: 2007-05-15
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公开(公告)号: US20080285328A1公开(公告)日: 2008-11-20
- 发明人: Tzyh-Cheang Lee , Ming-Yi Yang , Fu-Liang Yang , Denny Duan-lee Tang
- 申请人: Tzyh-Cheang Lee , Ming-Yi Yang , Fu-Liang Yang , Denny Duan-lee Tang
- 主分类号: G11C11/56
- IPC分类号: G11C11/56 ; H01L45/00
摘要:
A phase change memory is provided. The method includes forming contact plugs in a first dielectric layer. A second dielectric layer is formed overlying the first dielectric layer and a trench formed therein exposing portions of the contact plugs. A metal layer is formed over surfaces of the trench. One or more heaters are formed from the metal layer such that each heater is formed along one or more sidewalls and a portion of the bottom of the trench, wherein the portion of the heater along the sidewalls does not include a corner region of adjacent sidewalls. The trench is filled with a third dielectric layer, and a fourth dielectric layer is formed over the third dielectric layer. Trenches are formed in the fourth dielectric layer and filled with a phase change material. An electrode is formed over the phase change material.
公开/授权文献
- US07705424B2 Phase change memory 公开/授权日:2010-04-27
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