发明申请
US20090026072A1 AL-NI-LA-SI SYSTEM AL-BASED ALLOY SPUTTERING TARGET AND PROCESS FOR PRODUCING THE SAME
有权
AL-NI-LA-SI系统AL合金喷射靶及其生产方法
- 专利标题: AL-NI-LA-SI SYSTEM AL-BASED ALLOY SPUTTERING TARGET AND PROCESS FOR PRODUCING THE SAME
- 专利标题(中): AL-NI-LA-SI系统AL合金喷射靶及其生产方法
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申请号: US12172442申请日: 2008-07-14
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公开(公告)号: US20090026072A1公开(公告)日: 2009-01-29
- 发明人: Katsutoshi Takagi , Yuki Iwasaki , Masaya Ehira , Akira Nanbu , Mototaka Ochi , Hiroshi Goto , Nobuyuki Kawakami
- 申请人: Katsutoshi Takagi , Yuki Iwasaki , Masaya Ehira , Akira Nanbu , Mototaka Ochi , Hiroshi Goto , Nobuyuki Kawakami
- 申请人地址: JP Kobe-shi JP Kobe-shi
- 专利权人: Kabushiki Kaisha Kobe Seiko Sho (kobe Steel Ltd.),KOBELCO RESEARCH INSTITUTE, INC.
- 当前专利权人: Kabushiki Kaisha Kobe Seiko Sho (kobe Steel Ltd.),KOBELCO RESEARCH INSTITUTE, INC.
- 当前专利权人地址: JP Kobe-shi JP Kobe-shi
- 优先权: JP2007-192214 20070724
- 主分类号: C23C14/34
- IPC分类号: C23C14/34 ; C23C16/00
摘要:
The present invention relates to an Al—Ni—La—Si system Al-based alloy sputtering target including Ni, La and Si, in which, when a section from (¼)t to (¾)t (t: thickness) in a cross section vertical to a plane of the sputtering target is observed with a scanning electron microscope at a magnification of 2000 times, (1) a total area of an Al—Ni system intermetallic compound having an average particle diameter of 0.3 μm to 3 μm with respect to a total area of the entire Al—Ni system intermetallic compound is 70% or more in terms of an area fraction, the Al—Ni system intermetallic compound being mainly composed of Al and Ni; and (2) a total area of an Al—Ni—La—Si system intermetallic compound having an average particle diameter of 0.2 μm to 2 μm with respect to a total area of the entire Al—Ni—La—Si system intermetallic compound is 70% or more in terms of an area fraction, the Al—Ni—La—Si system intermetallic compound being mainly composed of Al, Ni, La, and Si.
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