发明申请
- 专利标题: CONTINUOUS COPPER ELECTROPLATING METHOD
- 专利标题(中): 连续电镀方法
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申请号: US12179352申请日: 2008-07-24
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公开(公告)号: US20090026083A1公开(公告)日: 2009-01-29
- 发明人: Shinji TACHIBANA , Koji Shimizu , Tomohiro Kawase , Naoyuki Omura , Toshihisa Isono , Kazuyoshi Nishimoto
- 申请人: Shinji TACHIBANA , Koji Shimizu , Tomohiro Kawase , Naoyuki Omura , Toshihisa Isono , Kazuyoshi Nishimoto
- 优先权: JP2007-195827 20070727
- 主分类号: C25D21/18
- IPC分类号: C25D21/18
摘要:
A continuous copper electroplating method wherein copper is continuously plated on a workpiece to be placed in a plating vessel accommodating a copper sulfate plating bath containing organic additives by use of a soluble or insoluble anode and a workpiece as a cathode, the method including overflowing the plating bath from the plating vessel in an lo overflow vessel under which the plating bath in the overflow vessel is returned to the plating vessel, providing an oxidative decomposition vessel, and returning a plating bath from the oxidative decomposition vessel through the overflow vessel to the plating vessel to circulate the plating bath between the plating vessel and oxidative decomposition vessel, and metallic copper is immersed in the plating bath in the oxidative decomposition vessel and exposed to air bubbling, so that decomposed/degenerated organic products formed by decomposition or degeneration produced during the copper electroplating can be oxidatively decomposed.
公开/授权文献
- US07988842B2 Continuous copper electroplating method 公开/授权日:2011-08-02
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