发明申请
US20090057776A1 METHOD OF FORMING FULLY SILICIDED NMOS AND PMOS SEMICONDUCTOR DEVICES HAVING INDEPENDENT POLYSILICON GATE THICKNESSES, AND RELATED DEVICE 有权
形成具有独立多晶硅栅厚度的完全硅化的NMOS和PMOS半导体器件的方法及相关器件

METHOD OF FORMING FULLY SILICIDED NMOS AND PMOS SEMICONDUCTOR DEVICES HAVING INDEPENDENT POLYSILICON GATE THICKNESSES, AND RELATED DEVICE
摘要:
A method of forming fully silicided NMOS and PMOS semiconductor devices having independent polysilicon gate thicknesses, and related device. At least some of the illustrative embodiments are methods comprising forming an N-type gate over a semiconductor substrate (the N-type gate having a first thickness), forming a P-type gate over the semiconductor substrate (the P-type gate having a second thickness different than the first thickness), and performing a simultaneous silicidation of the N-type gate and the P-type gate.
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