发明申请
US20090057776A1 METHOD OF FORMING FULLY SILICIDED NMOS AND PMOS SEMICONDUCTOR DEVICES HAVING INDEPENDENT POLYSILICON GATE THICKNESSES, AND RELATED DEVICE
有权
形成具有独立多晶硅栅厚度的完全硅化的NMOS和PMOS半导体器件的方法及相关器件
- 专利标题: METHOD OF FORMING FULLY SILICIDED NMOS AND PMOS SEMICONDUCTOR DEVICES HAVING INDEPENDENT POLYSILICON GATE THICKNESSES, AND RELATED DEVICE
- 专利标题(中): 形成具有独立多晶硅栅厚度的完全硅化的NMOS和PMOS半导体器件的方法及相关器件
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申请号: US11741551申请日: 2007-04-27
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公开(公告)号: US20090057776A1公开(公告)日: 2009-03-05
- 发明人: Freidoon Mehrad , Shaofeng Yu , Steven A. Vitale , Craig H. Huffman
- 申请人: Freidoon Mehrad , Shaofeng Yu , Steven A. Vitale , Craig H. Huffman
- 申请人地址: US TX Dallas
- 专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人地址: US TX Dallas
- 主分类号: H01L27/092
- IPC分类号: H01L27/092 ; H01L21/28
摘要:
A method of forming fully silicided NMOS and PMOS semiconductor devices having independent polysilicon gate thicknesses, and related device. At least some of the illustrative embodiments are methods comprising forming an N-type gate over a semiconductor substrate (the N-type gate having a first thickness), forming a P-type gate over the semiconductor substrate (the P-type gate having a second thickness different than the first thickness), and performing a simultaneous silicidation of the N-type gate and the P-type gate.
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