发明申请
- 专利标题: APPARATUS FOR ELECTROLYZING SULFURIC ACID, METHOD OF PERFORMING ELECTROLYSIS, AND APPARATUS FOR PROCESSING A SUBSTRATE
- 专利标题(中): 用于电解硫酸的装置,执行电解的方法和用于处理基板的装置
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申请号: US12274681申请日: 2008-11-20
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公开(公告)号: US20090078582A1公开(公告)日: 2009-03-26
- 发明人: Nobuo Kobayashi , Yukihiro Shibata , Naoya Hayamizu , Masaaki Kato
- 申请人: Nobuo Kobayashi , Yukihiro Shibata , Naoya Hayamizu , Masaaki Kato
- 申请人地址: JP Yokohama-shi JP Tokyo JP Tokyo
- 专利权人: Shibaura Mechatronics Corporation,Kabushiki Kaisha Toshiba,Chlorine Engineers Corp., Ltd
- 当前专利权人: Shibaura Mechatronics Corporation,Kabushiki Kaisha Toshiba,Chlorine Engineers Corp., Ltd
- 当前专利权人地址: JP Yokohama-shi JP Tokyo JP Tokyo
- 优先权: JP2007006017 20070115
- 主分类号: C25B1/00
- IPC分类号: C25B1/00 ; C25B9/00
摘要:
An apparatus for electrolyzing sulfuric acid, the apparatus comprising an electrolytic cell comprising a cathode chamber having a cathode and an anode chamber having an anode, the cathode chamber and the anode chamber being separated by a diaphragm, a sulfuric acid tank configured to store the sulfuric acid, a supply pipe connecting the sulfuric acid tank to an inlet port of the anode chamber, a connection pipe connecting an outlet port of the cathode chamber to the inlet port of the anode chamber, a first supply pump provided on the supply pipe and configured to supply the sulfuric acid from the sulfuric acid tank to the cathode chamber through the supply pipe, and a drain pipe connected to an outlet port of the anode chamber and configured to supply to a solution tank a solution containing an oxidizing agent generated by electrolysis in the anode chamber.
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