发明申请
US20090085084A1 Integrated Circuit and Methods of Manufacturing the Same 有权
集成电路及其制造方法

Integrated Circuit and Methods of Manufacturing the Same
摘要:
A method of manufacturing an integrated circuit includes forming landing pads in an array region of a substrate, individual ones of the landing pads being electrically coupled to individual ones of portions of devices formed in the substrate in the array region. The method also includes forming wiring lines within a peripheral region of the substrate. Forming the landing pads and forming the wiring lines includes a common lithographic process being effective in both the array and peripheral regions. The wiring lines and the landing pads of the integrated circuit are self-aligned.
公开/授权文献
信息查询
0/0