发明申请
- 专利标题: Integrated Circuit and Methods of Manufacturing the Same
- 专利标题(中): 集成电路及其制造方法
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申请号: US11863528申请日: 2007-09-28
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公开(公告)号: US20090085084A1公开(公告)日: 2009-04-02
- 发明人: Stefan Tegen , Klaus Muemmler , Peter Baars , Uta Mierau
- 申请人: Stefan Tegen , Klaus Muemmler , Peter Baars , Uta Mierau
- 申请人地址: DE Munich
- 专利权人: QIMONDA AG
- 当前专利权人: QIMONDA AG
- 当前专利权人地址: DE Munich
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L21/8242
摘要:
A method of manufacturing an integrated circuit includes forming landing pads in an array region of a substrate, individual ones of the landing pads being electrically coupled to individual ones of portions of devices formed in the substrate in the array region. The method also includes forming wiring lines within a peripheral region of the substrate. Forming the landing pads and forming the wiring lines includes a common lithographic process being effective in both the array and peripheral regions. The wiring lines and the landing pads of the integrated circuit are self-aligned.
公开/授权文献
- US07851356B2 Integrated circuit and methods of manufacturing the same 公开/授权日:2010-12-14
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