发明申请
US20090092744A1 Roll to Roll Evaporation Tool for Solar Absorber Precursor Formation
失效
用于太阳能吸收剂前体形成的卷筒式蒸发工具
- 专利标题: Roll to Roll Evaporation Tool for Solar Absorber Precursor Formation
- 专利标题(中): 用于太阳能吸收剂前体形成的卷筒式蒸发工具
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申请号: US11868443申请日: 2007-10-05
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公开(公告)号: US20090092744A1公开(公告)日: 2009-04-09
- 发明人: Mustafa Pinarbasi , Bulent M. Basol
- 申请人: Mustafa Pinarbasi , Bulent M. Basol
- 主分类号: B05D5/12
- IPC分类号: B05D5/12 ; C23C16/00
摘要:
An evaporation tool for forming a dopant structure on a front surface of a continuous workpiece, wherein the front surface includes a precursor layer to form Group IBIIIAVIA absorbers for solar cells and the dopant structure is used to introduce dopants into the precursor layer. The tool includes at least a first vapor source station to deposit a Group VIA material, such as Se, and a second vapor station to deposit a dopant material, such as Na, onto the continuous workpiece. A moving assembly of the tool holds and moves the continuous workpiece within the tool by feeding the continuous workpiece from a first end and taking up from a second end of the tool. A support assembly of the tool contacts a back surface of the continuous workpiece to remove the heat from and apply tension to the continuous workpiece during the process.
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