发明申请
US20090095722A1 LINK PROCESSING WITH HIGH SPEED BEAM DEFLECTION 有权
具有高速光束偏转的链接处理

LINK PROCESSING WITH HIGH SPEED BEAM DEFLECTION
摘要:
The present invention relates to the field of laser processing methods and systems, and specifically, to laser processing methods and systems for laser processing multi-material devices. Systems and methods may utilize high speed deflectors to improve processing energy window and/or improve processing speed. In some embodiments, a deflector is used for non-orthogonal scanning of beam spots. In some embodiment, a deflector is used to implement non-synchronous processing of target structures.
公开/授权文献
信息查询
0/0