发明申请
- 专利标题: LINK PROCESSING WITH HIGH SPEED BEAM DEFLECTION
- 专利标题(中): 具有高速光束偏转的链接处理
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申请号: US12233476申请日: 2008-09-18
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公开(公告)号: US20090095722A1公开(公告)日: 2009-04-16
- 发明人: Jonathan S. Ehrmann , Joseph J. Griffiths , James J. Cordingley , Donald J. Svetkoff , Shepard D. Johnson , Michael Plotkin
- 申请人: Jonathan S. Ehrmann , Joseph J. Griffiths , James J. Cordingley , Donald J. Svetkoff , Shepard D. Johnson , Michael Plotkin
- 申请人地址: US MA Bedford
- 专利权人: GSI GROUP CORPORATION
- 当前专利权人: GSI GROUP CORPORATION
- 当前专利权人地址: US MA Bedford
- 主分类号: B23K26/36
- IPC分类号: B23K26/36
摘要:
The present invention relates to the field of laser processing methods and systems, and specifically, to laser processing methods and systems for laser processing multi-material devices. Systems and methods may utilize high speed deflectors to improve processing energy window and/or improve processing speed. In some embodiments, a deflector is used for non-orthogonal scanning of beam spots. In some embodiment, a deflector is used to implement non-synchronous processing of target structures.
公开/授权文献
- US08269137B2 Link processing with high speed beam deflection 公开/授权日:2012-09-18
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