发明申请
US20090099991A1 METHOD AND SYSTEM FOR PREDICTING PROCESS PERFORMANCE USING MATERIAL PROCESSING TOOL AND SENSOR DATA
有权
使用材料加工工具和传感器数据预测过程性能的方法和系统
- 专利标题： METHOD AND SYSTEM FOR PREDICTING PROCESS PERFORMANCE USING MATERIAL PROCESSING TOOL AND SENSOR DATA
- 专利标题（中）： 使用材料加工工具和传感器数据预测过程性能的方法和系统
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申请号： US12255698申请日： 2008-10-22
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公开(公告)号： US20090099991A1公开(公告)日： 2009-04-16
- 发明人: Hieu A. LAM , Hongyu Yue , John Shriner
- 申请人： Hieu A. LAM , Hongyu Yue , John Shriner
- 申请人地址： JP Tokyo
- 专利权人： TOKYO ELECTRON LIMITED
- 当前专利权人： TOKYO ELECTRON LIMITED
- 当前专利权人地址： JP Tokyo
- 主分类号： G06N5/02
- IPC分类号： G06N5/02
摘要：
A method for constructing a process performance prediction model for a material processing system, the method including the steps of: recording tool data for a plurality of observations during a process in a process tool, the tool data comprises a plurality of tool data parameters; recording process performance data for the plurality of observations during the process in the process tool, the process performance data comprises one or more process performance parameters; performing a partial least squares analysis using the tool data and the process performance data; and computing correlation data from the partial least squares analysis.
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