发明申请
US20090117489A1 Compositons and processes for immersion lithography 有权
浸入式光刻的组合物和工艺

Compositons and processes for immersion lithography
摘要:
New photoresist compositions are provided that are useful for immersion lithography. Preferred photoresist compositions of the invention comprises two or more distinct materials that can be substantially non-mixable with a resin component of the resist. Particularly preferred photoresists of the invention can exhibit reduced leaching of resist materials into an immersion fluid contacting the resist layer during immersion lithography processing.
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