发明申请
US20090121291A1 DENSE CHEVRON NON-PLANAR FIELD EFFECT TRANSISTORS AND METHOD
有权
DENSE CHEVRON非平面场效应晶体管和方法
- 专利标题: DENSE CHEVRON NON-PLANAR FIELD EFFECT TRANSISTORS AND METHOD
- 专利标题(中): DENSE CHEVRON非平面场效应晶体管和方法
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申请号: US11939574申请日: 2007-11-14
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公开(公告)号: US20090121291A1公开(公告)日: 2009-05-14
- 发明人: Brent A. Anderson , Andres Bryant , Edward J. Nowak
- 申请人: Brent A. Anderson , Andres Bryant , Edward J. Nowak
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; H01L21/8234
摘要:
Disclosed are embodiments of semiconductor structure and a method of forming the semiconductor structure that simultaneously maximizes device density and avoids contacted-gate pitch and fin pitch mismatch, when multiple parallel angled fins are formed within a limited area on a substrate and then traversed by multiple parallel gates (e.g., in the case of stacked, chevron-configured, CMOS devices). This is accomplished by using, not a minimum lithographic fin pitch, but rather by using a fin pitch that is calculated as a function of a pre-selected contacted-gate pitch, a pre-selected fin angle and a pre-selected periodic pattern for positioning the fins relative to the gates within the limited area. Thus, the disclosed structure and method allow for the conversion of a semiconductor product design layout with multiple, stacked, planar FETs in a given area into a semiconductor product design layout with multiple, stacked, chevron-configured, non-planar FETs in the same area.
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