发明申请
- 专利标题: FENCELESS MAIN POLE DEFINITION FOR ADVANCED PERPENDICULAR MAGNETIC WRITE HEAD
- 专利标题(中): 高级磁性写字头的无缝主要定义
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申请号: US12343713申请日: 2008-12-24
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公开(公告)号: US20090139080A1公开(公告)日: 2009-06-04
- 发明人: Aron Pentek , Sue Siyang Zhang , Yi Zheng
- 申请人: Aron Pentek , Sue Siyang Zhang , Yi Zheng
- 主分类号: G11B5/127
- IPC分类号: G11B5/127
摘要:
A method for manufacturing a magnetic write head that avoids the challenges associated with the formation of fence structures during write pole definition. A magnetic write pole material is deposited. A mask structure is deposited over the magnetic write pole material. The mask structure includes a first hard mask, a marker layer, a physically robust, inorganic RIEable image transfer layer, a second hard mask structure over the image transfer layer and a photoresist layer over the second hard mask. A reactive ion etching process can be used to transfer the image of the photoresist mask and second hard mask layer onto the image transfer layer. An ion milling is performed to define the write pole. A layer of non-magnetic material such as alumina is deposited. An ion milling is performed until the marker layer has been reached, and another reactive ion etching is performed to remove the remaining hard mask.
公开/授权文献
- US08136228B2 Method for manufacturing a magnetic write head 公开/授权日:2012-03-20
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