发明申请
- 专利标题： CONDUCTIVE LINE COMPRISING A CAPPING LAYER
- 专利标题（中）： 包含吸收层的导电线
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申请号： US11947510申请日： 2007-11-29
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公开(公告)号： US20090140307A1公开(公告)日： 2009-06-04
- 发明人: Peter Baars , Andreas Eifler , Klaus Muemmler , Stefan Tegen
- 申请人： Peter Baars , Andreas Eifler , Klaus Muemmler , Stefan Tegen
- 主分类号： H01L29/94
- IPC分类号： H01L29/94 ; H01L21/44
摘要：
An integrated circuit includes a conductive line, the conductive line having a conductive layer made of a metal or a first compound including a metal and a capping layer made of a second compound comprising the metal, the capping layer being in contact with the conductive layer, the first compound being different from the second compound.
公开/授权文献
- US07777266B2 Conductive line comprising a capping layer 公开/授权日：2010-08-17
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