发明申请
- 专利标题: PHOTO DETECTOR
- 专利标题(中): 照片检测器
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申请号: US12325195申请日: 2008-11-29
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公开(公告)号: US20090140362A1公开(公告)日: 2009-06-04
- 发明人: Matthias Fertig , Nikolaj Moll , Thomas E. Morf , Thomas Pflueger , Jonas R. Weiss
- 申请人: Matthias Fertig , Nikolaj Moll , Thomas E. Morf , Thomas Pflueger , Jonas R. Weiss
- 优先权: EP07121872.1 20071129
- 主分类号: H01L31/00
- IPC分类号: H01L31/00
摘要:
A photo detector comprising a grating (PC). The grating (PC) is arranged on top of a surface of an active semiconductor layer. The grating (PC) is patterned in uninterrupted first strips (ST1), that are arranged in a first direction (x) in a first predetermined interval (a), and second strips (ST2), that are arranged in a second direction (y) in a second predetermined interval (b). The second strips (ST2) each comprise at least one interruption in a region between each two neighboring first strips (ST1) in form of a predetermined gap (d). Positively doped regions (P) and negatively doped regions (N) each are arranged as strips in parallel with the first strips (ST1) such that in a region between each two neighboring first strips (ST1) alternately either one of the positively doped regions (P) or one of the negatively doped regions (N) is arranged.
公开/授权文献
- US07821091B2 Photo detector 公开/授权日:2010-10-26
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