发明申请
- 专利标题: Convenient Replacement of Anode in Semiconductor Electroplating Apparatus
- 专利标题(中): 方便更换半导体电镀设备中的阳极
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申请号: US12036177申请日: 2008-02-22
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公开(公告)号: US20090211900A1公开(公告)日: 2009-08-27
- 发明人: Robert Rash , Frederick Wilmot , Mitchell Gee
- 申请人: Robert Rash , Frederick Wilmot , Mitchell Gee
- 申请人地址: US OR Tualatin
- 专利权人: NOVELLUS SYSTEMS, INC.
- 当前专利权人: NOVELLUS SYSTEMS, INC.
- 当前专利权人地址: US OR Tualatin
- 主分类号: C25B9/00
- IPC分类号: C25B9/00
摘要:
The convenient replacement of an anode in a semiconductor electroplating apparatus is disclosed. For example, in one disclosed embodiment, an electroplating system comprises an electroplating cell having an anode chamber, a cathode chamber, a selective transport barrier separating the anode chamber and the cathode chamber, and an anode disposed within the anode chamber. The anode comprises a plurality of pieces of anode material disposed within a removable anode holder.
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