发明申请
US20090211900A1 Convenient Replacement of Anode in Semiconductor Electroplating Apparatus 审中-公开
方便更换半导体电镀设备中的阳极

Convenient Replacement of Anode in Semiconductor Electroplating Apparatus
摘要:
The convenient replacement of an anode in a semiconductor electroplating apparatus is disclosed. For example, in one disclosed embodiment, an electroplating system comprises an electroplating cell having an anode chamber, a cathode chamber, a selective transport barrier separating the anode chamber and the cathode chamber, and an anode disposed within the anode chamber. The anode comprises a plurality of pieces of anode material disposed within a removable anode holder.
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