发明申请
US20090220756A1 REVERSIBLE PHOTO BLEACHABLE MATERIALS BASED ON NANO SIZED SEMICONDUCTOR PARTICLES AND THEIR OPTICAL APPLICATIONS
审中-公开
基于纳米尺寸半导体颗粒和其光学应用的可逆照相漂白材料
- 专利标题： REVERSIBLE PHOTO BLEACHABLE MATERIALS BASED ON NANO SIZED SEMICONDUCTOR PARTICLES AND THEIR OPTICAL APPLICATIONS
- 专利标题（中）： 基于纳米尺寸半导体颗粒和其光学应用的可逆照相漂白材料
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申请号： US12404472申请日： 2009-03-16
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公开(公告)号： US20090220756A1公开(公告)日： 2009-09-03
- 发明人: Zhiyun Chen , Erin F. Fleet , Serpil Gonen , Gregory D. Cooper
- 申请人： Zhiyun Chen , Erin F. Fleet , Serpil Gonen , Gregory D. Cooper
- 申请人地址： US MD College Park
- 专利权人： PIXELLIGENT TECHNOLOGIES LLC
- 当前专利权人： PIXELLIGENT TECHNOLOGIES LLC
- 当前专利权人地址： US MD College Park
- 主分类号： B32B5/16
- IPC分类号： B32B5/16 ; H01B1/22 ; B32B3/10 ; G01N21/00
摘要：
Semiconductor nano-particles, due to their specific physical properties, can be used as reversible photo-bleachable materials for a wide spectrum, from far infrared to deep UV. Applications include, reversible contrast enhancement layer (R-CEL) in optical lithography, lithography mask inspection and writing and optical storage technologies.