发明申请
- 专利标题: PROCESS AND TEMPERATURE INSENSITIVE FLICKER NOISE MONITOR CIRCUIT
- 专利标题(中): 过程和温度敏感型闪烁噪声监测电路
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申请号: US12061409申请日: 2008-04-02
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公开(公告)号: US20090251164A1公开(公告)日: 2009-10-08
- 发明人: Baher S. Haroun , Gaurav Chandra , Vijaya Bhaskar Rentala , Venkatesh Srinivasan , Hisashi Shichijo , Krishnaswamy Nagaraj
- 申请人: Baher S. Haroun , Gaurav Chandra , Vijaya Bhaskar Rentala , Venkatesh Srinivasan , Hisashi Shichijo , Krishnaswamy Nagaraj
- 主分类号: H01L21/66
- IPC分类号: H01L21/66 ; H03M3/00
摘要:
In an apparatus and method for monitoring defects in wafers, a monitoring circuit is fabricated on an area of each one of the wafers. The monitoring circuit includes representative devices that replicate similar devices located in a die area of the wafers. Defects if present in the representative devices contribute to a generation of a noise, thereby causing an imbalance in a differential signal measurable across selected ones of the representative devices. A digitizing circuit that uses a common mode voltage as a reference to measure the imbalance digitizes the differential signal to a digital signal, the digital signal being indicative of the noise generated by the defects. The digital signal is stored over a configurable time interval to form a digital bit stream. The digital bit stream is compared to a reference to determine whether the defects are within an allowable range.
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