发明申请
US20100011783A1 CRYOTRAP AND VACUUM PROCESSING DEVICE WITH CRYOTRAP 审中-公开
CRYOTRAP和真空加工设备与CRYOTRAP

CRYOTRAP AND VACUUM PROCESSING DEVICE WITH CRYOTRAP
摘要:
A cryotrap which is set in a vacuum vessel, and has an exhaust panel which condenses and exhausts a gas by cooling, and a cooling stage which is connected to a refrigerator and thereby cooled, includes a cooling storage body fixed on a cooling stage while maintaining thermal contact with it, and a mechanism which thermally connects/disconnects the cooling storage body 6 and the exhaust panel. The mechanism which performs thermal connection/disconnection has a movable unit which has a good heat conductivity and can come into contact with and separate from the exhaust panel and the cooling storage body.
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