发明申请
- 专利标题: CRYOTRAP AND VACUUM PROCESSING DEVICE WITH CRYOTRAP
- 专利标题(中): CRYOTRAP和真空加工设备与CRYOTRAP
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申请号: US12446675申请日: 2008-05-13
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公开(公告)号: US20100011783A1公开(公告)日: 2010-01-21
- 发明人: Kazutoshi Aoki , Takahiro Okada , Hisayoshi Komai , Isao Mochizuki , Tokumitsu Arai
- 申请人: Kazutoshi Aoki , Takahiro Okada , Hisayoshi Komai , Isao Mochizuki , Tokumitsu Arai
- 申请人地址: JP JP Kawasaki-shi
- 专利权人: CANON ANELVA TECHNIX CORPORATION
- 当前专利权人: CANON ANELVA TECHNIX CORPORATION
- 当前专利权人地址: JP JP Kawasaki-shi
- 优先权: JP2007-131706 20070517; JP2007-131707 20070517
- 国际申请: PCT/JP2008/058782 WO 20080513
- 主分类号: F04B37/08
- IPC分类号: F04B37/08 ; B01D8/00 ; F28F27/00 ; F04B37/14
摘要:
A cryotrap which is set in a vacuum vessel, and has an exhaust panel which condenses and exhausts a gas by cooling, and a cooling stage which is connected to a refrigerator and thereby cooled, includes a cooling storage body fixed on a cooling stage while maintaining thermal contact with it, and a mechanism which thermally connects/disconnects the cooling storage body 6 and the exhaust panel. The mechanism which performs thermal connection/disconnection has a movable unit which has a good heat conductivity and can come into contact with and separate from the exhaust panel and the cooling storage body.
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