Invention Application
US20100029030A1 PROCESS FOR PRODUCING SURFACE EMITTING LASER, PROCESS FOR PRODUCING SURFACE EMITTING LASER ARRAY, AND OPTICAL APPARATUS INCLUDING SURFACE EMITTING LASER ARRAY PRODUCED BY THE PROCESS
有权
用于生产表面发射激光的工艺,用于生产表面发射激光阵列的工艺,以及包括由工艺生产的表面发射激光阵列的光学装置
- Patent Title: PROCESS FOR PRODUCING SURFACE EMITTING LASER, PROCESS FOR PRODUCING SURFACE EMITTING LASER ARRAY, AND OPTICAL APPARATUS INCLUDING SURFACE EMITTING LASER ARRAY PRODUCED BY THE PROCESS
- Patent Title (中): 用于生产表面发射激光的工艺,用于生产表面发射激光阵列的工艺,以及包括由工艺生产的表面发射激光阵列的光学装置
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Application No.: US12509551Application Date: 2009-07-27
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Publication No.: US20100029030A1Publication Date: 2010-02-04
- Inventor: Tatsuro Uchida , Mitsuhiro Ikuta , Tetsuya Takeuchi
- Applicant: Tatsuro Uchida , Mitsuhiro Ikuta , Tetsuya Takeuchi
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Priority: JP2008-198936 20080731
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Provided is a process for producing a surface emitting laser including a surface relief structure provided on laminated semiconductor layers, including the steps of transferring, to a first dielectric film, a first pattern for defining a mesa structure and a second pattern for defining the surface relief structure in the same process; and forming a second dielectric film on the first dielectric film and a surface of the laminated semiconductor layers to which the first pattern and the second pattern have been transferred. Accordingly, a center position of the surface relief structure can be aligned with a center position of a current confinement structure at high precision.
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