Invention Application
US20100029030A1 PROCESS FOR PRODUCING SURFACE EMITTING LASER, PROCESS FOR PRODUCING SURFACE EMITTING LASER ARRAY, AND OPTICAL APPARATUS INCLUDING SURFACE EMITTING LASER ARRAY PRODUCED BY THE PROCESS 有权
用于生产表面发射激光的工艺,用于生产表面发射激光阵列的工艺,以及包括由工艺生产的表面发射激光阵列的光学装置

  • Patent Title: PROCESS FOR PRODUCING SURFACE EMITTING LASER, PROCESS FOR PRODUCING SURFACE EMITTING LASER ARRAY, AND OPTICAL APPARATUS INCLUDING SURFACE EMITTING LASER ARRAY PRODUCED BY THE PROCESS
  • Patent Title (中): 用于生产表面发射激光的工艺,用于生产表面发射激光阵列的工艺,以及包括由工艺生产的表面发射激光阵列的光学装置
  • Application No.: US12509551
    Application Date: 2009-07-27
  • Publication No.: US20100029030A1
    Publication Date: 2010-02-04
  • Inventor: Tatsuro UchidaMitsuhiro IkutaTetsuya Takeuchi
  • Applicant: Tatsuro UchidaMitsuhiro IkutaTetsuya Takeuchi
  • Applicant Address: JP Tokyo
  • Assignee: CANON KABUSHIKI KAISHA
  • Current Assignee: CANON KABUSHIKI KAISHA
  • Current Assignee Address: JP Tokyo
  • Priority: JP2008-198936 20080731
  • Main IPC: H01L21/00
  • IPC: H01L21/00
PROCESS FOR PRODUCING SURFACE EMITTING LASER, PROCESS FOR PRODUCING SURFACE EMITTING LASER ARRAY, AND OPTICAL APPARATUS INCLUDING SURFACE EMITTING LASER ARRAY PRODUCED BY THE PROCESS
Abstract:
Provided is a process for producing a surface emitting laser including a surface relief structure provided on laminated semiconductor layers, including the steps of transferring, to a first dielectric film, a first pattern for defining a mesa structure and a second pattern for defining the surface relief structure in the same process; and forming a second dielectric film on the first dielectric film and a surface of the laminated semiconductor layers to which the first pattern and the second pattern have been transferred. Accordingly, a center position of the surface relief structure can be aligned with a center position of a current confinement structure at high precision.
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