发明申请
US20100037959A1 METHOD FOR SUPPLYING PROCESS GAS, SYSTEM FOR SUPPLYING PROCESS GAS, AND SYSTEM FOR PROCESSING OBJECT TO BE PROCESSED
审中-公开
供应过程气体的方法，供应过程气体的系统和用于处理对象的系统
- 专利标题： METHOD FOR SUPPLYING PROCESS GAS, SYSTEM FOR SUPPLYING PROCESS GAS, AND SYSTEM FOR PROCESSING OBJECT TO BE PROCESSED
- 专利标题（中）： 供应过程气体的方法，供应过程气体的系统和用于处理对象的系统
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申请号： US12514527申请日： 2007-11-13
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公开(公告)号： US20100037959A1公开(公告)日： 2010-02-18
- 发明人: Takayuki Kamaishi , Eiichi Komori , Susumu Yamauchi , Akifumi Hayashi
- 申请人： Takayuki Kamaishi , Eiichi Komori , Susumu Yamauchi , Akifumi Hayashi
- 优先权： JP2006-306109 20061113
- 国际申请： PCT/JP2007/072002 WO 20071113
- 主分类号： H01L21/67
- IPC分类号： H01L21/67
摘要：
A method of supplying a process gas comprises a step in which there is generated a process gas that is polymerizable depending on a temperature, and a step in which the thus generated process gas is supplied to a processing apparatus 4 configured to perform a predetermined process to an object to be processed W under a reduced-pressure atmosphere. When the process gas is supplied to the processing apparatus 4, a flow rate of the process gas is controlled by using a mass flow-rate control unit of a lower differential pressure type having a diaphragm 80, in which an appropriate operation range of a supply pressure is set lower than the atmospheric pressure. Thus, a supply rate (actual flow rate) of a process gas such as an HF gas that is polymerizable depending on a temperature can be precisely controlled in a stable manner.
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