发明申请
- 专利标题: VERTICAL THERMOELECTRIC STRUCTURES
- 专利标题(中): 垂直热电结构
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申请号: US12544548申请日: 2009-08-20
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公开(公告)号: US20100044704A1公开(公告)日: 2010-02-25
- 发明人: Barry John Male , Philip L. Hower
- 申请人: Barry John Male , Philip L. Hower
- 申请人地址: US TX Dallas
- 专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人地址: US TX Dallas
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L21/70
摘要:
A thermoelectric device is disclosed which includes metal thermal terminals protruding from a top surface of an IC, connected to vertical thermally conductive conduits made of interconnect elements of the IC. Lateral thermoelectric elements are connected to the vertical conduits at one end and heatsinked to the IC substrate at the other end. The lateral thermoelectric elements are thermally isolated by interconnect dielectric materials on the top side and field oxide on the bottom side. When operated in a generator mode, the metal thermal terminals are connected to a heat source and the IC substrate is connected to a heat sink. Thermal power flows through the vertical conduits to the lateral thermoelectric elements, which generate an electrical potential. The electrical potential may be applied to a component or circuit in the IC. The thermoelectric device may be integrated into an IC without adding fabrication cost or complexity.
公开/授权文献
- US08728846B2 Vertical thermoelectric structures 公开/授权日:2014-05-20
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