发明申请
- 专利标题: CAPACITIVE ACCELEROMETER
- 专利标题(中): 电容式加速度计
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申请号: US12517068申请日: 2007-12-05
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公开(公告)号: US20100050771A1公开(公告)日: 2010-03-04
- 发明人: Chang-Han Je , Gunn Hwang , Sung-Hae Jung , Myung-Lae Lee , Chang-Auck Choi
- 申请人: Chang-Han Je , Gunn Hwang , Sung-Hae Jung , Myung-Lae Lee , Chang-Auck Choi
- 申请人地址: KR Daejeon-city
- 专利权人: Electronics and Telecommunications Research Instit
- 当前专利权人: Electronics and Telecommunications Research Instit
- 当前专利权人地址: KR Daejeon-city
- 优先权: KR10-2006-0122551 20061205; KR10-2007-0043804 20070504
- 国际申请: PCT/KR2007/006284 WO 20071205
- 主分类号: G01P15/125
- IPC分类号: G01P15/125
摘要:
A conventional capacitive accelerometer has a limitation in reducing a distance between a sensing electrode and a reference electrode, and requires a complex process and a separate method of correcting a clearance difference caused by a process error. However, the capacitive accelerometer of the present invention has high sensitivity, can be simply manufactured by maintaining a very narrow distance between a reference electrode and a sensing electrode, and can make it unnecessary to individually correct each manufactured accelerometer by removing or drastically reducing a functional difference due to a process error.
公开/授权文献
- US08113054B2 Capacitive accelerometer 公开/授权日:2012-02-14
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