发明申请
- 专利标题: METHOD OF PREPARING ELECTROLYTIC COPPER SOLUTION ACIDIFIED WITH SULFURIC ACID, SULFURIC-ACID-ACIDIFIED ELECTROLYTIC COPPER SOLUTION PREPARED BY THE PREPARATION METHOD, AND ELECTRODEPOSITED COPPER FILM
- 专利标题(中): 制备用硫酸制备的电解铜溶液的方法,由制备方法制备的硫酸 - 酸化电解铜溶液和电沉积铜膜
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申请号: US12444020申请日: 2007-10-02
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公开(公告)号: US20100089758A1公开(公告)日: 2010-04-15
- 发明人: Sakiko Tomonaga , Makoto Dobashi , Junshi Yoshioka , Ayumu Tateoka , Mitsuyoshi Matsuda , Hisao Sakai
- 申请人: Sakiko Tomonaga , Makoto Dobashi , Junshi Yoshioka , Ayumu Tateoka , Mitsuyoshi Matsuda , Hisao Sakai
- 申请人地址: JP Tokyo
- 专利权人: MITSUI MINING & SMELTING CO., LTD.
- 当前专利权人: MITSUI MINING & SMELTING CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JPJP2006-272327 20061003
- 国际申请: PCT/JP2007/069294 WO 20071002
- 主分类号: C25D3/38
- IPC分类号: C25D3/38 ; C25D7/00
摘要:
An object of the present invention is to provide a method for preparing a sulfuric acid base copper electrolytic solution used for formation of an electro-deposited copper film comprising a surface excellent in smoothness and gloss when formed by using the solution just after preparation and is prepared by using mono-sulfides. To achieve the object, a sulfuric acid base copper electrolytic solution is made to contain a sulfonated active sulfur compound, the bis(3-sulfopropyl)disulfide which is recommended for formation of a glossy electro-deposited copper film. And the bis(3-sulfopropyl)disulfide contained is obtained by converting a 3-mercapto-1-propanesulfonic acid into the bis(3-sulfopropyl)disulfide in an aqueous solution of the 3-mercapto-1-propanesulfonic acid by an oxidation reaction. In the oxidation reaction, an air bubbling method is preferably used to prevent oxidative decomposition of the 3-mercapto-1-propanesulfonic acid.