发明申请
- 专利标题： SILICON-BASED ANTIREFLECTIVE COATING COMPOSITIONS
- 专利标题（中）： 硅基抗反射涂料组合物
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申请号： US12449735申请日： 2008-02-25
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公开(公告)号： US20100092895A1公开(公告)日： 2010-04-15
- 发明人: Ruzhi Zhang , Wookyu Kim , David J. Abdallah , PingHung Lu , Mark O. Neissor , Ralph R. Dammel , Ari Karkkainen
- 申请人： Ruzhi Zhang , Wookyu Kim , David J. Abdallah , PingHung Lu , Mark O. Neissor , Ralph R. Dammel , Ari Karkkainen
- 国际申请： PCT/IB2008/000609 WO 20080225
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; C08G77/04 ; C08G77/38
摘要：
A polymer comprising a siloxane polymer having at least one Si—OH group and at least one Si—OR group, where R is condensation stabilizing group optionally having a reactive functional group, wherein the siloxane polymer, when placed into a solvent, has a weight average molecular weight increase of less than or equal to 50% after aging for one week at 40° C. as measured by GPC is provided.
公开/授权文献
- US08524441B2 Silicon-based antireflective coating compositions 公开/授权日：2013-09-03
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