发明申请
- 专利标题： MICROMECHANICAL COMPONENT HAVING AN ANTI-ADHESIVE LAYER
- 专利标题（中）： 具有防粘层的微机电部件
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申请号： US12312165申请日： 2007-09-10
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公开(公告)号： US20100127339A1公开(公告)日： 2010-05-27
- 发明人: Franz Laermer , Silvia Kronmueller , Tino Fuchs
- 申请人： Franz Laermer , Silvia Kronmueller , Tino Fuchs
- 优先权： DE102006050188.8 20061025
- 国际申请： PCT/EP2007/059448 WO 20070910
- 主分类号： H01L29/84
- IPC分类号： H01L29/84 ; H01L21/50
摘要：
A micromechanical component, having a substrate and a functional element, the functional element having a functional surface which has an anti-adhesion layer, that has been applied at least in regions, for reducing the surface adhesion forces, and in which the anti-adhesion layer is stable to a temperature of more than 800° C.