发明申请
- 专利标题: FLOW RATE RANGE VARIABLE TYPE FLOW RATE CONTROL APPARATUS
- 专利标题(中): 流量范围可变型流量控制装置
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申请号: US11913277申请日: 2006-06-22
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公开(公告)号: US20100139775A1公开(公告)日: 2010-06-10
- 发明人: Tadahiro Ohmi , Masahito Saito , Shoichi Hino , Tsuyoshi Shimazu , Kazuyuki Miura , Kouji Nishino , Masaaki Nagase , Katsuyuki Sugita , Kaoru Hirata , Ryousuke Dohi , Takashi Hirose , Tsutomu Shinohara , Nobukazu Ikeda , Tomokazu Imai , Toshihide Yoshida , Hisashi Tanaka
- 申请人: Tadahiro Ohmi , Masahito Saito , Shoichi Hino , Tsuyoshi Shimazu , Kazuyuki Miura , Kouji Nishino , Masaaki Nagase , Katsuyuki Sugita , Kaoru Hirata , Ryousuke Dohi , Takashi Hirose , Tsutomu Shinohara , Nobukazu Ikeda , Tomokazu Imai , Toshihide Yoshida , Hisashi Tanaka
- 申请人地址: JP Osaka-shi, Osaka JP Sendai-shi, Miyagi JP Tokyo
- 专利权人: FUJIKIN INCORPORATED,NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY,TOKYO ELECTRON LTD.
- 当前专利权人: FUJIKIN INCORPORATED,NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY,TOKYO ELECTRON LTD.
- 当前专利权人地址: JP Osaka-shi, Osaka JP Sendai-shi, Miyagi JP Tokyo
- 优先权: JP2005-185845 20050627
- 国际申请: PCT/JP06/12952 WO 20060622
- 主分类号: F15D1/00
- IPC分类号: F15D1/00
摘要:
A pressure type flow control device enabling a reduction in size and an installation cost by accurately controlling the flow of a fluid in a wide flow range. Specifically, the flow of the fluid flowing in an orifice (8) is calculated as Qc=KP1 (K is a proportionality factor) or Qc=KP2m(P1−P2)n (K is a proportionality factor and m and n are constants) by using a pressure P1 on the upstream side of the orifice and a pressure P2 on the downstream side of the orifice. A fluid passage between the downstream side of the control valve of the flow control device and a fluid feed pipe is formed of at least two or more fluid passages positioned parallel with each other. Orifices with different fluid flow characteristics are interposed in the fluid passages positioned parallel with each other. For the control of the fluid in a small flow area, the fluid in the small flow area is allowed to flow to one orifice. For the control of the flow in the large flow area, the fluid in the large flow area is allowed to flow to the other orifice by switching the fluid passages.
公开/授权文献
- US08418714B2 Flow rate range variable type flow rate control apparatus 公开/授权日:2013-04-16
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