Pressure type flow rate control reference and corrosion resistant pressure type flow rate controller used for the same
    5.
    发明授权
    Pressure type flow rate control reference and corrosion resistant pressure type flow rate controller used for the same 有权
    压力式流量控制参考和耐腐蚀压力式流量控制器用于相同

    公开(公告)号:US08210022B2

    公开(公告)日:2012-07-03

    申请号:US12332897

    申请日:2008-12-11

    IPC分类号: G01F25/00 G05D7/06

    摘要: A pressure type flow rate control reference allows the performance of flow rate calibrations of a flow rate controller on all types of gases, including corrosive gases, at low costs, and also has excellent flow rate control accuracy. The pressure type flow rate control reference includes a pressure controller for adjusting the pressure of a calibration gas from a calibration gas supply source, a first volume provided on the downstream side of a pressure controller, a first connection mouth of an uncalibrated flow rate controller provided on the downstream side of the first volume, a reference pressure type flow rate controller connected to a second connection mouth on the downstream side of the uncalibrated flow rate controller, a second volume provided on the downstream side of a reference pressure type flow rate controller, and an evacuation device provided on the downstream side of the second volume.

    摘要翻译: 压力式流量控制参考允许以低成本执行流量控制器对所有类型气体(包括腐蚀性气体)的流量校准,并且还具有优异的流量控制精度。 压力型流量控制基准包括用于调节来自校准气体供给源的校准气体的压力的压力控制器,设置在压力控制器的下游侧的第一容积,未校准的流量控制器的第一连接口, 在第一容积的下游侧具有与未校准流量控制器的下游侧的第二连接口连接的基准压力型流量控制器,设置在基准压力型流量控制器的下游侧的第二容积, 以及设置在第二容积的下游侧的抽空装置。

    PRESSURE TYPE FLOW RATE CONTROL REFERENCE AND CORROSION RESISTANT PRESSURE TYPE FLOW RATE CONTROLLER USED FOR THE SAME
    6.
    发明申请
    PRESSURE TYPE FLOW RATE CONTROL REFERENCE AND CORROSION RESISTANT PRESSURE TYPE FLOW RATE CONTROLLER USED FOR THE SAME 失效
    压力型流量控制参考和耐腐蚀压力类型流量控制器

    公开(公告)号:US20120234406A1

    公开(公告)日:2012-09-20

    申请号:US13483159

    申请日:2012-05-30

    IPC分类号: F16K31/36

    摘要: A pressure type flow rate control reference allows the performance of flow rate calibrations of a flow rate controller on all types of gases, including corrosive gases, at low costs, and also has excellent flow rate control accuracy. The pressure type flow rate control reference includes a pressure controller for adjusting the pressure of a calibration gas from a calibration gas supply source, a first volume provided on the downstream side of a pressure controller, a first connection mouth of an uncalibrated flow rate controller provided on the downstream side of the first volume, a reference pressure type flow rate controller connected to a second connection mouth on the downstream side of the uncalibrated flow rate controller, a second volume provided on the downstream side of a reference pressure type flow rate controller, and an evacuation device provided on the downstream side of the second volume.

    摘要翻译: 压力式流量控制参考允许以低成本执行流量控制器对所有类型气体(包括腐蚀性气体)的流量校准,并且还具有优异的流量控制精度。 压力型流量控制基准包括用于调节来自校准气体供给源的校准气体的压力的压力控制器,设置在压力控制器的下游侧的第一容积,未校准的流量控制器的第一连接口, 在第一容积的下游侧具有与未校准流量控制器的下游侧的第二连接口连接的基准压力型流量控制器,设置在基准压力型流量控制器的下游侧的第二容积, 以及设置在第二容积的下游侧的抽空装置。

    PRESSURE TYPE FLOW RATE CONTROL REFERENCE AND CORROSION RESISTANT PRESSURE TYPE FLOW RATE CONTROLLER USED FOR THE SAME
    7.
    发明申请
    PRESSURE TYPE FLOW RATE CONTROL REFERENCE AND CORROSION RESISTANT PRESSURE TYPE FLOW RATE CONTROLLER USED FOR THE SAME 有权
    压力型流量控制参考和耐腐蚀压力类型流量控制器

    公开(公告)号:US20090146089A1

    公开(公告)日:2009-06-11

    申请号:US12332897

    申请日:2008-12-11

    IPC分类号: F16K31/12

    摘要: A pressure type flow rate control reference which allows performance of flow rate calibrations of a flow rate controller on all types of gases, including corrosive gases, at low costs, and also has excellent flow rate control accuracy.The pressure type flow rate control reference includes a pressure controller for adjusting the pressure of a calibration gas from a calibration gas supply source, a first volume provided on the downstream side of a pressure controller, a first connection mouth of an uncalibrated flow rate controller provided on the downstream side of the first volume, a reference pressure type flow rate controller connected to a second connection mouth on the downstream side of the uncalibrated flow rate controller, a second volume provided on the downstream side of a reference pressure type flow rate controller, and an evacuation device provided on the downstream side of the second volume.

    摘要翻译: 一种压力式流量控制参考,其允许以低成本执行流量控制器对所有类型气体(包括腐蚀性气体)的流量校准,并且还具有优异的流速控制精度。 压力型流量控制基准包括用于调节来自校准气体供给源的校准气体的压力的压力控制器,设置在压力控制器的下游侧的第一容积,未校准的流量控制器的第一连接口, 在第一容积的下游侧具有与未校准流量控制器的下游侧的第二连接口连接的基准压力型流量控制器,设置在基准压力型流量控制器的下游侧的第二容积, 以及设置在第二容积的下游侧的抽空装置。

    Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employed
    9.
    发明授权
    Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employed 有权
    采用孔口的垫片式孔口和压力型流量控制装置

    公开(公告)号:US09127796B2

    公开(公告)日:2015-09-08

    申请号:US13169971

    申请日:2011-06-27

    摘要: A gasket type orifice includes a first orifice base having a through-type passage in a central area thereof, a second orifice base having in a central area thereof a through-type passage communicating with the passage of the first orifice base, and an orifice plate having an orifice hole formed in a central area thereof, wherein the orifice plate is mounted by insertion in an airtight manner between both orifice bases, and the gasket type orifice is installed in a fluid passage, in which the outer end faces of both orifice bases respectively serve as sealing faces, and an outer diameter of the second orifice base, located on the downstream side, is larger than an outer diameter of the first orifice base located on the upstream side, and an outer peripheral edge portion of an inner end face of the second orifice base serves as another sealing face.

    摘要翻译: 垫圈型孔口包括在其中心区域具有通孔型通道的第一孔口基座,在其中心区域具有与第一孔口基座的通道连通的通孔型通道的第二孔口基座,以及孔板 具有形成在其中心区域的孔口孔,其中孔板通过在两个孔口底座之间以气密方式插入而安装,并且垫片型孔口安装在流体通道中,其中两个孔口基座的外端面 分别用作密封面,位于下游侧的第二孔基部的外径大于位于上游侧的第一孔基部的外径,内端面的外周缘部 的另一个密封面。

    Fluid control device
    10.
    发明授权
    Fluid control device 有权
    流体控制装置

    公开(公告)号:US09115813B2

    公开(公告)日:2015-08-25

    申请号:US13575951

    申请日:2010-12-09

    IPC分类号: F16K7/14 F16K31/122

    摘要: This invention provides a fluid control device which is capable of visually recognizing its opening and closing states with a simple configuration. The casing 3 is formed so as to be opened upward. The piston 8 is disposed at an upper end portion of a valve rod 7 such that a piston upper end portion is exposed from an opening of the casing 3 when the valve rod 7 is located at the upper position.

    摘要翻译: 本发明提供一种流体控制装置,其能够以简单的构造以视觉方式识别其打开和关闭状态。 壳体3形成为向上开口。 当阀杆7位于上部位置时,活塞8设置在阀杆7的上端部,使得活塞上端部从壳体3的开口露出。