Invention Application
US20100147684A1 ULTRA-SENSITIVE GAS SENSOR USING OXIDE SEMICONDUCTOR NANOFIBER AND METHOD OF FABRICATING THE SAME
审中-公开
使用氧化物半导体纳米纤维的超声波气体传感器及其制造方法
- Patent Title: ULTRA-SENSITIVE GAS SENSOR USING OXIDE SEMICONDUCTOR NANOFIBER AND METHOD OF FABRICATING THE SAME
- Patent Title (中): 使用氧化物半导体纳米纤维的超声波气体传感器及其制造方法
-
Application No.: US12503647Application Date: 2009-07-15
-
Publication No.: US20100147684A1Publication Date: 2010-06-17
- Inventor: Jin Ah PARK , Su Jae Lee , Jae Hyun Moon , Tae Hyoung Zhung
- Applicant: Jin Ah PARK , Su Jae Lee , Jae Hyun Moon , Tae Hyoung Zhung
- Applicant Address: KR Daejeon
- Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee Address: KR Daejeon
- Priority: KR10-2008-0126594 20081212
- Main IPC: G01N27/26
- IPC: G01N27/26 ; B05D5/12

Abstract:
An ultra-sensitive gas sensor using semiconductor oxide nanofibers and a method of fabricating the same are provided. The gas sensor includes an insulating substrate, a metal electrode formed on the insulating substrate, and a semiconductor metal oxide nanofibers layer formed on the metal electrode and having nanoparticles of high sensitivity coated thereon. The method of fabricating a semiconductor oxide nanofibers gas sensor includes fabricating an oxide using a solution for electrospinning, electrospinning the solution, performing an annealing process to form an oxide semiconductor nanofiber, and partially coating a nano-sized metal oxide or metal catalyst particle having high sensitivity to a specific gas on a surface of the nanofiber having a large specific surface area. As a result, a semiconductor oxide nanofibers gas sensor having ultra sensitivity, high selectivity, fast response and long-term stability can be fabricated.
Information query