发明申请
US20100147684A1 ULTRA-SENSITIVE GAS SENSOR USING OXIDE SEMICONDUCTOR NANOFIBER AND METHOD OF FABRICATING THE SAME
审中-公开
使用氧化物半导体纳米纤维的超声波气体传感器及其制造方法
- 专利标题: ULTRA-SENSITIVE GAS SENSOR USING OXIDE SEMICONDUCTOR NANOFIBER AND METHOD OF FABRICATING THE SAME
- 专利标题(中): 使用氧化物半导体纳米纤维的超声波气体传感器及其制造方法
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申请号: US12503647申请日: 2009-07-15
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公开(公告)号: US20100147684A1公开(公告)日: 2010-06-17
- 发明人: Jin Ah PARK , Su Jae Lee , Jae Hyun Moon , Tae Hyoung Zhung
- 申请人: Jin Ah PARK , Su Jae Lee , Jae Hyun Moon , Tae Hyoung Zhung
- 申请人地址: KR Daejeon
- 专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人地址: KR Daejeon
- 优先权: KR10-2008-0126594 20081212
- 主分类号: G01N27/26
- IPC分类号: G01N27/26 ; B05D5/12
摘要:
An ultra-sensitive gas sensor using semiconductor oxide nanofibers and a method of fabricating the same are provided. The gas sensor includes an insulating substrate, a metal electrode formed on the insulating substrate, and a semiconductor metal oxide nanofibers layer formed on the metal electrode and having nanoparticles of high sensitivity coated thereon. The method of fabricating a semiconductor oxide nanofibers gas sensor includes fabricating an oxide using a solution for electrospinning, electrospinning the solution, performing an annealing process to form an oxide semiconductor nanofiber, and partially coating a nano-sized metal oxide or metal catalyst particle having high sensitivity to a specific gas on a surface of the nanofiber having a large specific surface area. As a result, a semiconductor oxide nanofibers gas sensor having ultra sensitivity, high selectivity, fast response and long-term stability can be fabricated.