发明申请
- 专利标题： Device for Holding a Template for Use in Imprint Lithography
- 专利标题（中）： 用于压印光刻的模板的设备
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申请号： US12715915申请日： 2010-03-02
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公开(公告)号： US20100173033A1公开(公告)日： 2010-07-08
- 发明人: Todd Bailey , Byung J. Choi , Matthew Colburn , S. V. Sreenivasan , C. Grant Willson , John Ekerdt
- 申请人： Todd Bailey , Byung J. Choi , Matthew Colburn , S. V. Sreenivasan , C. Grant Willson , John Ekerdt
- 申请人地址： US TX Austin
- 专利权人： BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
- 当前专利权人： BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
- 当前专利权人地址： US TX Austin
- 主分类号： B29C59/02
- IPC分类号： B29C59/02 ; B29C35/08
摘要：
An imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include a body with an opening configured to receive the template, a support plate, and an actuator system coupled to the body. The actuator system may be configured to alter a physical dimension of the template during use.
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