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8 条记录 (耗时 0.022 秒)

    Release layer comprising diamond-like carbon (DLC) or doped DLC with tunable composition for imprint lithography templates and contact masks
    1.
    发明申请
    Release layer comprising diamond-like carbon (DLC) or doped DLC with tunable composition for imprint lithography templates and contact masks 审中-公开
    释放层包括类金刚石碳（DLC）或具有可调组合物的掺杂DLC，用于压印光刻模板和接触掩模

    公开(公告)号：US20060145398A1

    公开(公告)日：2006-07-06

    申请号：US11027473

    申请日：2004-12-30

    申请人： Todd Bailey ,  Nicholas Stacey ,  Edward Engbrecht ,  John Ekerdt

    发明人： Todd Bailey ,  Nicholas Stacey ,  Edward Engbrecht ,  John Ekerdt

    IPC分类号： B29C33/60

    CPC分类号： B81C1/0046 ,  B29C33/58 ,  B29C33/60

    摘要： The present invention pertains to disposing a diamond-like composition on a template, wherein the diamond-like composition acts as a release layer. The diamond-like composition is substantially transparent to actinic radiation, e.g., ultraviolet (UV) light, and will also have a desired surface energy, wherein the desired surface energy minimizes adhesion between the template and an underlying material disposed on a substrate. The diamond-like composition is characterized with a low surface energy that exhibits desirable release characteristics.

    摘要翻译： 本发明涉及在模板上设置类金刚石组合物，其中类金刚石组合物用作剥离层。 类金刚石组合物对于光化辐射（例如紫外线（UV））光是基本上透明的，并且还将具有所需的表面能，其中期望的表面能使最小化模板和布置在基底上的下层材料之间的粘合性。 金刚石组合物的特征在于表现出所需释放特性的低表面能。

    Template for room temperature, low pressure micro-and nano-imprint lithography
    3.
    发明授权
    Template for room temperature, low pressure micro-and nano-imprint lithography 有权
    模板用于室温，低压微型和纳米压印光刻

    公开(公告)号：US06696220B2

    公开(公告)日：2004-02-24

    申请号：US09976681

    申请日：2001-10-12

    申请人： Todd Bailey ,  Byung J. Choi ,  Matthew Colburn ,  S. V. Sreenivasan ,  C. Grant Willson ,  John Ekerdt

    发明人： Todd Bailey ,  Byung J. Choi ,  Matthew Colburn ,  S. V. Sreenivasan ,  C. Grant Willson ,  John Ekerdt

    IPC分类号： G03C176

    CPC分类号： G11B5/855 ,  B29C35/0888 ,  B29C37/0053 ,  B29C43/003 ,  B29C2035/0827 ,  B29C2043/025 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F9/00 ,  Y10S977/887

    摘要： Described are imprint lithography templates, methods of forming and using the templates, and a template holder device. An imprint lithography template may include a body with a plurality of recesses on a surface of the body. The body may be of a material that is substantially transparent to activating light. At least a portion of the plurality of recesses may define features having a feature size less than about 250 nm. A template may be formed by obtaining a material that is substantially transparent to activating light and forming a plurality or recesses on a surface of the template. In some embodiments, a template may further include at least one alignment mark. In some embodiments, a template may further include a gap sensing area. An imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include a body with an opening configured to receive the template, a support plate, and at least one piezo actuator coupled to the body. The piezo actuator may be configured to alter a physical dimension of the template during use.

    摘要翻译： 描述了压印光刻模板，形成和使用模板的方法以及模板保持装置。 压印光刻模板可以包括在主体的表面上具有多个凹部的主体。 身体可以是对于激活光是基本上透明的材料。 多个凹部的至少一部分可以限定具有小于约250nm的特征尺寸的特征。 可以通过获得对于激活光而基本上透明并在模板的表面上形成多个或多个凹陷的材料来形成模板。 在一些实施例中，模板还可以包括至少一个对准标记。 在一些实施例中，模板还可以包括间隙感测区域。 可以使用压印光刻模板来在设置在基板上的可光固化液体中形成印刷层。 在使用期间，模板可以设置在模板保持器内。 模板保持器可以包括具有构造成接收模板的开口的主体，支撑板和耦合到主体的至少一个压电致动器。 压电致动器可以被配置为在使用期间改变模板的物理尺寸。