Invention Application
US20100195095A1 FOREIGN MATTER INSPECTION METHOD AND FOREIGN MATTER INSPECTION APPARATUS 有权
外部事件检查方法和外部事件检查装置

FOREIGN MATTER INSPECTION METHOD AND FOREIGN MATTER INSPECTION APPARATUS
Abstract:
In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.
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