公开(公告)号：US08422009B2

公开(公告)日：2013-04-16

申请号：US13181159

申请日：2011-07-12

申请人： Hiroyuki Yamashita ,  Mamoru Kobayashi ,  Eiji Imai ,  Yoshio Morishige ,  Koichi Nagoya ,  Hideki Fukushima

发明人： Hiroyuki Yamashita ,  Mamoru Kobayashi ,  Eiji Imai ,  Yoshio Morishige ,  Koichi Nagoya ,  Hideki Fukushima

IPC分类号： G01N21/00

CPC分类号： G01N21/95607 ,  G01N21/94 ,  G01N2021/8825

摘要： In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.

摘要翻译： 一种异物检查装置，其特征在于，包括：将检查光照射到待检查物品的检查区域的照射单元; 强度检测单元，用于通过向检查光照射检测从检查区域产生的反射光或散射光的强度; 位置检测单元，用于检测检查区域内的反射光或散射光的位置; 以及决定单元，用于判定在所述检查区域内是否存在异物; 异物检查装置包括：能够在其上显示其中在检查区域的整个区域上指示了阈值的阈值图像的显示单元和由阈值图像转换的检测灵敏度图像。

公开(公告)号：US07719671B2

公开(公告)日：2010-05-18

申请号：US11709858

申请日：2007-02-23

申请人： Hiroyuki Yamashita ,  Mamoru Kobayashi ,  Eiji Imai ,  Yoshio Morishige ,  Koichi Nagoya ,  Hideki Fukushima

发明人： Hiroyuki Yamashita ,  Mamoru Kobayashi ,  Eiji Imai ,  Yoshio Morishige ,  Koichi Nagoya ,  Hideki Fukushima

IPC分类号： G01N21/00

CPC分类号： G01N21/95607 ,  G01N21/94 ,  G01N2021/8825

摘要： In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.

摘要翻译： 一种异物检查装置，其特征在于，包括：将检查光照射到待检查物品的检查区域的照射单元; 强度检测单元，用于通过向检查光照射检测从检查区域产生的反射光或散射光的强度; 位置检测单元，用于检测检查区域内的反射光或散射光的位置; 以及决定单元，用于判定在所述检查区域内是否存在异物; 异物检查装置包括：能够在其上显示其中在检查区域的整个区域上指示了阈值的阈值图像的显示单元和由阈值图像转换的检测灵敏度图像。

公开(公告)号：US07986405B2

公开(公告)日：2011-07-26

申请号：US12758363

申请日：2010-04-12

申请人： Hiroyuki Yamashita ,  Mamoru Kobayashi ,  Eiji Imai ,  Yoshio Morishige ,  Koichi Nagoya ,  Hideki Fukushima

发明人： Hiroyuki Yamashita ,  Mamoru Kobayashi ,  Eiji Imai ,  Yoshio Morishige ,  Koichi Nagoya ,  Hideki Fukushima

IPC分类号： G01N21/00

CPC分类号： G01N21/95607 ,  G01N21/94 ,  G01N2021/8825

摘要： In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.

摘要翻译： 一种异物检查装置，其特征在于，包括：将检查光照射到待检查物品的检查区域的照射单元; 强度检测单元，用于通过向检查光照射检测从检查区域产生的反射光或散射光的强度; 位置检测单元，用于检测检查区域内的反射光或散射光的位置; 以及决定单元，用于判定在所述检查区域内是否存在异物; 异物检查装置包括：能够在其上显示其中在检查区域的整个区域上指示了阈值的阈值图像的显示单元和由阈值图像转换的检测灵敏度图像。

公开(公告)号：US20100195095A1

公开(公告)日：2010-08-05

申请号：US12758363

申请日：2010-04-12

申请人： Hiroyuki YAMASHITA ,  Mamoru Kobayashi ,  Eiji Imai ,  Yoshio Morishige ,  Koichi Nagoya ,  Hideki Fukushima

发明人： Hiroyuki YAMASHITA ,  Mamoru Kobayashi ,  Eiji Imai ,  Yoshio Morishige ,  Koichi Nagoya ,  Hideki Fukushima

IPC分类号： G01N21/00

CPC分类号： G01N21/95607 ,  G01N21/94 ,  G01N2021/8825

摘要： In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.

摘要翻译： 一种异物检查装置，其特征在于，包括：将检查光照射到待检查物品的检查区域的照射单元; 强度检测单元，用于通过向检查光照射检测从检查区域产生的反射光或散射光的强度; 位置检测单元，用于检测检查区域内的反射光或散射光的位置; 以及决定单元，用于判定在所述检查区域内是否存在异物; 异物检查装置包括：能够在其上显示其中在检查区域的整个区域上指示了阈值的阈值图像的显示单元和由阈值图像转换的检测灵敏度图像。

公开(公告)号：US20070201019A1

公开(公告)日：2007-08-30

申请号：US11709858

申请日：2007-02-23

申请人： Hiroyuki Yamashita ,  Mamoru Kobayashi ,  Eiji Imai ,  Yoshio Morishige ,  Koichi Nagoya ,  Hideki Fukushima

发明人： Hiroyuki Yamashita ,  Mamoru Kobayashi ,  Eiji Imai ,  Yoshio Morishige ,  Koichi Nagoya ,  Hideki Fukushima

IPC分类号： G01N21/88

CPC分类号： G01N21/95607 ,  G01N21/94 ,  G01N2021/8825

摘要： In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.

摘要翻译： 一种异物检查装置，其特征在于，包括：将检查光照射到待检查物品的检查区域的照射单元; 强度检测单元，用于通过向检查光照射检测从检查区域产生的反射光或散射光的强度; 位置检测单元，用于检测检查区域内的反射光或散射光的位置; 以及决定单元，用于判定在所述检查区域内是否存在异物; 异物检查装置包括：能够在其上显示其中在检查区域的整个区域上指示了阈值的阈值图像的显示单元和由阈值图像转换的检测灵敏度图像。

公开(公告)号：US20110267605A1

公开(公告)日：2011-11-03

申请号：US13181159

申请日：2011-07-12

申请人： Hiroyuki Yamashita ,  Mamoru Kobayashi ,  Eiji Imai ,  Yoshio Morishige ,  Koichi Nagoya ,  Hideki Fukushima

发明人： Hiroyuki Yamashita ,  Mamoru Kobayashi ,  Eiji Imai ,  Yoshio Morishige ,  Koichi Nagoya ,  Hideki Fukushima

IPC分类号： G01N21/47 ,  G01N21/55

CPC分类号： G01N21/95607 ,  G01N21/94 ,  G01N2021/8825

摘要： In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.

摘要翻译： 一种异物检查装置，其特征在于，包括：将检查光照射到待检查物品的检查区域的照射单元; 强度检测单元，用于通过向检查光照射检测从检查区域产生的反射光或散射光的强度; 位置检测单元，用于检测检查区域内的反射光或散射光的位置; 以及决定单元，用于判定在所述检查区域内是否存在异物; 异物检查装置包括：能够在其上显示其中在检查区域的整个区域上指示了阈值的阈值图像的显示单元和由阈值图像转换的检测灵敏度图像。

公开(公告)号：US07999932B2

公开(公告)日：2011-08-16

申请号：US12771842

申请日：2010-04-30

申请人： Hiroyuki Yamashita ,  Yukihisa Mohara ,  Eiji Imai

发明人： Hiroyuki Yamashita ,  Yukihisa Mohara ,  Eiji Imai

IPC分类号： G01N21/00 ,  G01B11/02

CPC分类号： H01L21/67288 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/9503 ,  G01N21/95607 ,  G01N2021/95615

摘要： An inspection apparatus includes a wafer stage for carrying a wafer, an illumination module which irradiates an inspection beam on the wafer carried on the wafer stage, a detection module which detects scattering rays or reflection rays from the wafer on the wafer stage and outputs an image signal, a coordinates control module which stores information about the arrangement of individual inspection areas on the wafer, and an imperfect area recognition module which recognizes, on the basis of the inspection area arrangement information stored in the coordinates control module, an imperfect inspection area interfering with a wafer edge.

摘要翻译： 检查装置包括用于承载晶片的晶片台，在晶片载物台上承载的晶片上照射检查光束的照明模块，检测来自晶片台上的晶片的散射光线或反射光线的检测模块，并输出图像 信号，存储关于晶片上的各个检查区域的布置的信息的坐标控制模块，以及不完备区域识别模块，其基于存储在坐标控制模块中的检查区域布置信息识别出不完美的检查区域干扰 具有晶片边缘。

公开(公告)号：US07733473B2

公开(公告)日：2010-06-08

申请号：US12057168

申请日：2008-03-27

申请人： Hiroyuki Yamashita ,  Yukihisa Mohara ,  Eiji Imai

发明人： Hiroyuki Yamashita ,  Yukihisa Mohara ,  Eiji Imai

IPC分类号： G01N21/00

CPC分类号： H01L21/67288 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/9503 ,  G01N21/95607 ,  G01N2021/95615

摘要： An inspection apparatus includes a wafer stage for carrying a wafer, an illumination module which irradiates an inspection beam on the wafer carried on the wafer stage, a detection module which detects scattering rays or reflection rays from the wafer on the wafer stage and outputs an image signal, a coordinates control module which stores information about the arrangement of individual inspection areas on the wafer, and an imperfect area recognition module which recognizes, on the basis of the inspection area arrangement information stored in the coordinates control module, an imperfect inspection area interfering with a wafer edge.

摘要翻译： 检查装置包括用于承载晶片的晶片台，在晶片载物台上承载的晶片上照射检查光束的照明模块，检测来自晶片台上的晶片的散射光线或反射光线的检测模块，并输出图像 信号，存储关于晶片上的各个检查区域的布置的信息的坐标控制模块，以及不完备区域识别模块，其基于存储在坐标控制模块中的检查区域布置信息识别出不完美的检查区域干扰 具有晶片边缘。

公开(公告)号：US20120224173A1

公开(公告)日：2012-09-06

申请号：US13469071

申请日：2012-05-10

申请人： Hiroyuki Yamashita ,  Yukihisa Mohara ,  Eiji Imai

发明人： Hiroyuki Yamashita ,  Yukihisa Mohara ,  Eiji Imai

IPC分类号： G01N21/88

CPC分类号： H01L21/67288 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/9503 ,  G01N21/95607 ,  G01N2021/95615

摘要： An inspection apparatus includes a wafer stage for carrying a wafer, an illumination module which irradiates an inspection beam on the wafer carried on the wafer stage, a detection module which detects scattering rays or reflection rays from the wafer on the wafer stage and outputs an image signal, a coordinates control module which stores information about the arrangement of individual inspection areas on the wafer, and an imperfect area recognition module which recognizes, on the basis of the inspection area arrangement information stored in the coordinates control module, an imperfect inspection area interfering with a wafer edge.

摘要翻译： 检查装置包括用于承载晶片的晶片台，在晶片载物台上承载的晶片上照射检查光束的照明模块，检测来自晶片台上的晶片的散射光线或反射光线的检测模块，并输出图像 信号，存储关于晶片上的各个检查区域的布置的信息的坐标控制模块，以及不完备区域识别模块，其基于存储在坐标控制模块中的检查区域布置信息识别出不完美的检查区域干扰 具有晶片边缘。

公开(公告)号：US07898653B2

公开(公告)日：2011-03-01

申请号：US12003123

申请日：2007-12-20

申请人： Eiji Imai ,  Masami Ooyama ,  Hideyuki Okamoto ,  Hiroyuki Yamashita

发明人： Eiji Imai ,  Masami Ooyama ,  Hideyuki Okamoto ,  Hiroyuki Yamashita

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/94 ,  G01N21/95607

摘要： Selection with alignment marks of an optimal template, its identification and similarity judgment are conducted by a calculation function of a correlation value provided to a foreign matter inspection apparatus. In other words, the foreign matter inspection apparatus includes unit for registering feature points of alignment marks formed on a surface of an inspected object, unit for collecting image data of the alignment marks formed on the surface of the inspected object and a data processor for extracting a feature point from the image data and calculating a correlation value of both feature points, and registers the image data of the alignment mark on the basis of a threshold value of the correlation value.

摘要翻译： 通过提供给异物检查装置的相关值的计算函数进行最佳模板的对准标记的选择，其识别和相似性判断。 换句话说，异物检查装置包括用于登记形成在检查对象的表面上的对准标记的特征点的单元，用于收集形成在被检查对象的表面上的对准标记的图像数据的单元和用于提取的数据处理器 来自图像数据的特征点并计算两个特征点的相关值，并且基于相关值的阈值来登记对准标记的图像数据。