Invention Application
US20100213054A1 VACUUM COATING APPARATUS WITH MUTIPLE ANODES AND FILM COATING METHOD USING THE SAME 有权
具有多个阳极的真空涂料装置和使用其的薄膜涂布方法

VACUUM COATING APPARATUS WITH MUTIPLE ANODES AND FILM COATING METHOD USING THE SAME
Abstract:
A vacuum coating apparatus is disclosed. The apparatus includes a cathode target, a plurality of anodes, a transiting device, a pulsed arc discharge device, and a pulsed laser device. The plurality of anodes is placed on the transiting device and successively passes though a working position by the transiting device. The pulsed arc discharge device is electrically connected to the cathode target and the anode at the operable position to form plasma in a vacuum chamber for film coating. The pulsed laser device is located outside of the vacuum chamber and provides a pulsed laser beam onto the surface of the cathode surface to serve as a plasma trigger. A coating method for the vacuum coating apparatus is also disclosed.
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