发明申请
- 专利标题: METHOD FOR MANUFACTURING NONVOLATILE STORAGE DEVICE
- 专利标题(中): 制造非易失存储器件的方法
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申请号: US12726749申请日: 2010-03-18
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公开(公告)号: US20100248431A1公开(公告)日: 2010-09-30
- 发明人: Kazuhito NISHITANI , Eiji Ito , Machiko Tsukiji , Hiroyuki Fukumizu , Naoya Hayamizu , Katsuhiro Sato
- 申请人: Kazuhito NISHITANI , Eiji Ito , Machiko Tsukiji , Hiroyuki Fukumizu , Naoya Hayamizu , Katsuhiro Sato
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-071974 20090324; JP2009-075258 20090325; JP2009-075274 20090325
- 主分类号: H01L21/822
- IPC分类号: H01L21/822 ; H01L21/02
摘要:
A method for manufacturing a nonvolatile storage device including: a plurality of first electrodes aligning in a first direction; a plurality of second electrodes aligning in a second direction nonparallel to the first direction and provided above the first electrodes; and a first storage unit provided between the first electrode and the second electrode and including a first storage layer, a resistance of the first storage layer changing by at least one of an applied electric field and an applied current, the method includes: stacking a first electrode film forming a first electrode and a first storage unit film forming a first storage unit on a major surface of a substrate; processing the first electrode film and the first storage unit film into a strip shape aligning in the first direction; burying a sacrifice layer between the processed first electrode films and between the processed first storage unit films; forming a second electrode film forming a second electrode on the first storage unit film and the sacrifice layer; forming a mask layer having a lower etching rate than the sacrifice layer on the second electrode film; processing the second electrode film into a strip shape aligning in the second direction nonparallel to the first direction by using the mask layer as a mask; removing a portion of the first storage unit film exposed from the sacrifice layer by using the mask layer as a mask to process the first storage unit film into a columnar shape including a side wall along the first direction and a side wall along the second direction; removing the sacrifice layer to expose the first storage unit film having been covered with the sacrifice layer; and removing the exposed first storage unit film.
公开/授权文献
- US08153488B2 Method for manufacturing nonvolatile storage device 公开/授权日:2012-04-10
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